COMPARATIVE STUDY BETWEEN KINETIC AND THERMODYNAMIC CALCULATION OF COMPOSITION IN SF6 PLASMAS

Autor: Pascal André, Vincent Rat, Marie-Françoise Elchinger, Pierre Fauchais, Jacque Aubreton, André Lefort

Publikováno v: Progress in Plasma Processing of Materials 2001 Proceedings of the Sixth European Conference on Thermal Plasma Processes Strasbourg, France May 30 – June 3, 2001
Sixth European Conference on Thermal Plasma Processes Strasbourg, France May 30 – June 3, 2001
Sixth European Conference on Thermal Plasma Processes Strasbourg, France May 30 – June 3, 2001, 2001, France. pp.411-418
High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes, 2011, 15 (2), pp.105-113. ⟨10.1615/HighTempMatProc.v15.i2⟩
High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes, Begell House, 2011, 15 (2), pp.105-113. ⟨10.1615/HighTempMatProc.v15.i2⟩

International audience; In this paper we compare the compositions calculated in chemical equilibrium for an SF6 plasma at atmospheric pressure, in the multi-temperature model and using kinetics (33 reactions involving 18 species). The ratio of the el

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6180ba3e5811c58353f40c487a5d3ecc
https://doi.org/10.1615/hightempmatproc.v15.i2.30

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Thermodynamic and transport properties of two-temperature SF6 plasmas.

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Calculation of a two-temperature plasma composition: bases and application to SF6.

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