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pro vyhledávání: '"S.F.A. Bender"'
Volatile organic compound (VOC) emission to the atmosphere is of great concern to semiconductor manufacturing industries, research laboratories, the public, and regulatory agencies. Some industries are seeking ways to reduce emissions by reducing VOC
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8eb356ac4c2b5e20d0c5f3f50623a6ca
https://doi.org/10.2172/481566
https://doi.org/10.2172/481566
Further reductions in particulate contamination in semiconductor device manufacturing environments will be required to meet the future challenges of producing devices with decreased dimensions. Using pods (microenvironments) to provide very clean env
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::997a2259576bbb10c6980de4ada1d277
https://doi.org/10.2172/10151515
https://doi.org/10.2172/10151515
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