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pro vyhledávání: '"S.D. Senturia"'
Autor:
S.D. Senturia
Publikováno v:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 51:127-130
Based on his many years of experience, a JMEMS editor provides guidelines for authors that will, if followed, greatly reduce the risk of a devastatingly negative result from the review process. The premise is that there are certain things that rightf
Autor:
S.D. Senturia
Publikováno v:
Journal of Microelectromechanical Systems. 12:229-232
Editor’s Note: Stephen D. Senturia has been a member of the Board of Editors for IEEE/ASME JMEMS since the journal’s first issue in 1992 and was named a Senior Editor in 1998. This experience, coupled with his service from 1985–1995 as the Soli
Autor:
S.D. Senturia, V. T. Srikar
Publikováno v:
Journal of Microelectromechanical Systems. 11:499-504
The design and fabrication of polysilicon flexural beam resonators with very high mechanical quality factors (Q) is essential for many MEMS applications. Based on an extension of the well-established theory of thermoelastic damping in homogeneous bea
Autor:
S.D. Senturia, V. T. Srikar
Publikováno v:
Journal of Microelectromechanical Systems. 11:206-214
As a first step toward formulating guidelines for the design of dynamically reliable MEMS, we analyze the mechanical response of, and formulate failure criteria for, a large class of shock loaded microsystems. MEMS are modeled as microstructures atta
Publikováno v:
Journal of Microelectromechanical Systems. 9:361-369
Doubly supported silicon-micromachined beams are increasingly used to study the mechanical properties of materials. Residual stresses in the beams and support compliance cause significant vertical deflections, which affect the performance of these mi
Publikováno v:
Journal of Microelectromechanical Systems. 9:270-278
Publikováno v:
Journal of Microelectromechanical Systems. 9:262-269
Reduced-order dynamic macromodels are an effective way to capture device behavior for rapid circuit and system simulation. In this paper, we report the successful implementation of a methodology for automatically generating reduced-order nonlinear dy
Autor:
E.S. Hung, S.D. Senturia
Publikováno v:
Journal of Microelectromechanical Systems. 8:497-505
The pull-in instability limits the travel distance of elastically suspended parallel-plate electrostatic microactuators to about 1/3 of the undeflected gap distance. In this paper, we examine the "leveraged bending" and "strain-stiffening" methods fo
Autor:
S.D. Senturia, E.S. Hung
Publikováno v:
Journal of Microelectromechanical Systems. 8:280-289
In this paper, we demonstrate how efficient low-order dynamical models for micromechanical devices can be constructed using data from a few runs of fully meshed but slow numerical models such as those created by the finite-element method (FEM). These
Autor:
S.D. Senturia, Luis Castañer
Publikováno v:
Journal of Microelectromechanical Systems. 8:290-298
The speed and total energy required to accomplish pull-in switching of a generic electrostatic actuator is examined. It is found that the value of the source resistance of the voltage drive used for switching has a profound effect on both switching s