Zobrazeno 1 - 10
of 69
pro vyhledávání: '"S. Yoneoka"'
Autor:
Vu A. Hong, Eldwin J. Ng, Andrew B. Graham, James Christian Salvia, Thomas W. Kenny, M.W. Messana, Todd T. Branchflower, S. Yoneoka
Publikováno v:
Journal of Microelectromechanical Systems. 24:351-359
The fatigue lifetime of single crystal silicon (SCS) was characterized in an environment free of oxygen, humidity, and organics. Long-term ( $> 10^{10}$ Hz) fatigue experiments performed with smooth-walled SCS devices showed no signs of fatigue damag
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::105edeba0ba31f951b4223776e135351
https://doi.org/10.1109/jmems.2014.2331231
https://doi.org/10.1109/jmems.2014.2331231
Autor:
Saurabh A. Chandorkar, Roger T. Howe, J. Provine, Rob N. Candler, Thomas W. Kenny, S. Yoneoka, Roya Maboudian, Andrew B. Graham, Christopher S. Roper
Publikováno v:
Journal of Microelectromechanical Systems. 19:357-366
This paper presents the characterization of sealed microelectromechanical devices and their packaging fabricated in a polycrystalline 3C silicon carbide (poly-SiC) thin-film encapsulation process. In this fabrication technique, devices are sealed wit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0b8a4e5f12c9a5df4ce193ad97100312
https://doi.org/10.1109/jmems.2010.2040460
https://doi.org/10.1109/jmems.2010.2040460
Autor:
Thomas W. Kenny, M.W. Messana, Bongsang Kim, Andrew B. Graham, Roger T. Howe, Peter G. Hartwell, S. Yoneoka, J. Provine, Renata Melamud
Publikováno v:
Journal of Microelectromechanical Systems. 19:28-37
Packaging of microelectromechanical systems (MEMS) is a critical step in the transition from development to commercialized product. This paper presents a thin-film encapsulation process that allows varying trench widths suitable for MEMS devices with
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::737634064d31afa0f69f82d80cd8cb30
https://doi.org/10.1109/jmems.2009.2035717
https://doi.org/10.1109/jmems.2009.2035717
Autor:
Kuan-Lin Chen, David B. Heinz, M.W. Messana, Eldwin J. Ng, Manu Agarwal, Markus Lutz, Yushi Yang, Camille L. M. Everhart, Ian B. Flader, Thomas W. Kenny, V. Qu, Andrew B. Graham, Gary Yama, Matthew A. Hopcroft, Yunhan Chen, Rob N. Candler, Vu A. Hong, Aaron Partridge, B. Kim, Renata Melamud, Shasha Wang, Gaurav Bahl, Hyung Kyu Lee, James Christian Salvia, Gary O'brien, Chia-Fang Chiang, S. Yoneoka, Chae Hyuck Ahn
Publikováno v:
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).
Research on MEMS Resonators began over 50 years ago. In just the last 10 years, there has been a series of important technological developments, and (finally!) success at commercialization. The presentation will highlight some key milestones along th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4ecaada99982c1a406ed0fb086d3a68c
https://doi.org/10.1109/memsys.2015.7050869
https://doi.org/10.1109/memsys.2015.7050869
Autor:
Thomas W. Kenny, Renata Melamud, Hyung Kyu Lee, Saurabh A. Chandorkar, James Christian Salvia, S. Yoneoka
Publikováno v:
Journal of Microelectromechanical Systems. 20:1228-1230
In microelectromechanical systems resonators, nonlinear operation is feasible, but instabilities can arise if open-loop resonators operate above the critical vibration amplitude. This fact has led to a reluctance to operate resonator-based oscillator
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4b633ad7972c82b53e53bb3981f2e575
https://doi.org/10.1109/jmems.2011.2170821
https://doi.org/10.1109/jmems.2011.2170821
Autor:
Thomas W. Kenny, Gaurav Bahl, James Christian Salvia, S. Yoneoka, Saurabh A. Chandorkar, Renata Melamud
Publikováno v:
Journal of Microelectromechanical Systems. 19:1270-1272
This letter presents a method of using electrostatic tuning to actively diminish the phase noise in a micromechanical oscillator that is caused by external vibrations. An accelerometer measures the acceleration applied to a micromechanical resonator
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::094d906530725b59103cd8b7667757d6
https://doi.org/10.1109/jmems.2010.2067444
https://doi.org/10.1109/jmems.2010.2067444
Autor:
Andrew B. Graham, M.W. Messana, Thomas W. Kenny, T.T. Branchflower, Vu A. Hong, James Christian Salvia, S. Yoneoka, Eldwin J. Ng
Publikováno v:
2012 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4af075f402c28e23cbc9745e7d373728
https://doi.org/10.31438/trf.hh2012.120
https://doi.org/10.31438/trf.hh2012.120
Autor:
Matthieu Liger, Roger T. Howe, Takashi Kodama, Jaeho Lee, Gary Yama, Kenneth E. Goodson, Marika Gunji, J. Provine, S. Yoneoka, Thomas W. Kenny
Publikováno v:
Nano letters. 12(2)
While the literature is rich with data for the electrical behavior of nanotransistors based on semiconductor nanowires and carbon nanotubes, few data are available for ultrascaled metal interconnects that will be demanded by these devices. Atomic lay
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4d731a979f4b0b74178cc99686e4aff0
https://pubmed.ncbi.nlm.nih.gov/22224582
https://pubmed.ncbi.nlm.nih.gov/22224582
Autor:
Thomas W. Kenny, R. Schuster, Matthieu Liger, Fritz B. Prinz, Roger T. Howe, S. Yoneoka, Gary Yama, J. Provine, Fabian Purkl
Publikováno v:
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.
This paper presents an uncooled infrared bolometer using a metal thin film that is formed by atomic layer deposition (ALD). Nanometer-thick freestanding layers enabled by ALD have the potential to improve the performance of bolometers with achieving
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::af6c9351fbbacdef800e241eb48544d2
https://doi.org/10.1109/memsys.2011.5734515
https://doi.org/10.1109/memsys.2011.5734515
Autor:
B. Kim, Renata Melamud, James Christian Salvia, Gaurav Bahl, Matthew A. Hopcroft, Hyung Kyu Lee, S. Yoneoka, Thomas W. Kenny, Y.Q. Qu, Saurabh A. Chandorkar
Publikováno v:
2010 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1df3cb6ae33db162e9b013fa5dd0cf35
https://doi.org/10.31438/trf.hh2010.18
https://doi.org/10.31438/trf.hh2010.18