Zobrazeno 1 - 3
of 3
pro vyhledávání: '"S. T. Sen-Britain"'
Autor:
L. B. Bayu Aji, S. J. Shin, J. H. Bae, A. M. Engwall, J. A. Hammons, S. T. Sen-Britain, P. B. Mirkarimi, S. O. Kucheyev
Publikováno v:
Journal of Vacuum Science & Technology A. 41:023407
The deposition of thick B[Formula: see text]C films with low residual stress by conventional direct-current magnetron sputtering is accompanied by the formation of dust particulates contaminating the target, chamber, and substrates and leading to the
Autor:
Chapman, James, Kweon, Kyoung E., Zhu, Yakun, Bushick, Kyle, Bayu Aji, Leonardus Bimo, Colla, Christopher A., Mason, Harris, Goldman, Nir, Keilbart, Nathan, Qiu, S. Roger, Heo, Tae Wook, Rodriguez, Jennifer, Wood, Brandon C.
Publikováno v:
Journal of Materials Chemistry A; 4/28/2023, Vol. 11 Issue 16, p8670-8683, 14p
Autor:
Bayu Aji, L. B., Shin, S. J., Bae, J. H., Engwall, A. M., Hammons, J. A., Sen-Britain, S. T., Mirkarimi, P. B., Kucheyev, S. O.
Publikováno v:
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Mar2023, Vol. 41 Issue 2, p1-12, 12p