Zobrazeno 1 - 1
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pro vyhledávání: '"S. S. Zinovev"'
Publikováno v:
2020 International Russian Automation Conference (RusAutoCon).
The mathematical model is proposed, that allows to calculate formation of thin-film coatings at magnetron sputtering of materials, it consolidates the mathematical description of magnetic fields of ionic-plasma devices, movements of electrons of sput
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::236172717864f1cbb3d90ebf0c00a38d
https://doi.org/10.1109/rusautocon49822.2020.9208191
https://doi.org/10.1109/rusautocon49822.2020.9208191
