Zobrazeno 1 - 10
of 15
pro vyhledávání: '"S. R. Walther"'
Publikováno v:
Review of Scientific Instruments. 61:1110-1116
Several techniques for suppressing the electrons before they form part of the extracted beam have been studied in a small multicusp H− source. It is found that some schemes reduce both the electron and the H− output currents. Other approaches, su
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::37973e0c40b1240ecb05552f962eb0fb
https://doi.org/10.1063/1.1141432
https://doi.org/10.1063/1.1141432
Autor:
S. R. Walther
Publikováno v:
Review of Scientific Instruments. 65:1307-1309
Due to concerns about energy purity and reduced beam current, the use of multiply charged ions to achieve higher effective ion energies with a fixed acceleration potential has not been common for implantation users in the semiconductor industry. Ener
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::06adcc05ce1a15f3565f1f7ab4d25e55
https://doi.org/10.1063/1.1144988
https://doi.org/10.1063/1.1144988
Autor:
S. R. Walther
Publikováno v:
Review of Scientific Instruments. 63:2562-2564
A new 2.45 GHz microwave ion source has been developed for high‐current ion implantation. The source uses permanent magnets to generate the ECR magnetic field. This leads to a much simpler and more compact design than typical solenoidal field micro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b58fb3bb75441d4446776f0f9ff5faad
https://doi.org/10.1063/1.1142889
https://doi.org/10.1063/1.1142889
Publikováno v:
Review of Scientific Instruments. 61:315-317
A small multicusp ion source has been used to generate beams of nitrogen ions. To achieve a high percentage of N+ ions, the source was equipped with a magnetic filter and operated with a high N2 gas density. A nearly pure atomic nitrogen ion (N+) bea
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f26d4dada2b926f0fa85c5a6e56e3612
https://doi.org/10.1063/1.1141280
https://doi.org/10.1063/1.1141280
Publikováno v:
Review of Scientific Instruments. 61:327-329
The small multicusp ion source developed at Lawrence Berkeley Laboratory (LBL) has been equipped with a low voltage ratio, single aperture extraction system. The influence of the potential of the plasma electrode and of a dipole filter field on the b
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c90945a9b79116141df3bd6434d49070
https://doi.org/10.1063/1.1141284
https://doi.org/10.1063/1.1141284
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 24:408
Numerous experimental studies for near-surface analyses of B in Si have shown that the B distribution within the top few nanometers is inaccurately characterized by secondary-ion-mass-spectrometry (SIMS) depth profiling with O2 flooding or normal-inc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cffd59e7d886daee8656b0f5ddce9830
https://doi.org/10.1116/1.2163879
https://doi.org/10.1116/1.2163879
Publikováno v:
Review of Scientific Instruments. 57:1531-1535
A small microwave ion source has been fabricated from a quartz tube with one end enclosed by a two‐grid accelerator. The source is also enclosed by a cavity operated at a frequency of 2.45 GHz. Microwave power as high as 500 W can be coupled to the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bc3e538199bbb65e8ddb2eea3d2884a6
https://doi.org/10.1063/1.1139197
https://doi.org/10.1063/1.1139197
Publikováno v:
Journal of Applied Physics. 64:3424-3428
The effect on H− ion production by adding cesium or xenon to a hydrogen discharge, in a small magnetically filtered multicusp ion source, has been investigated. Addition of cesium vapor to the hydrogen discharge resulted in a factor of 16 increase
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ced7bf5349bcc78c7af928c9aa566182
https://doi.org/10.1063/1.341498
https://doi.org/10.1063/1.341498
Publikováno v:
Physical Review Letters. 62:764-767
It has been found that the ${\mathrm{H}}^{\ensuremath{-}}$ output current from a multicusp source can be substantially increased if the hydrogen plasma is seeded with cesium or barium. Experimental results demonstrate that, for a pure-hydrogen discha
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::883291aaed1d63604a3ec097f740066f
https://doi.org/10.1103/physrevlett.62.764
https://doi.org/10.1103/physrevlett.62.764
Publikováno v:
Review of Scientific Instruments. 60:531-538
A small multicusp source has been developed to generate volume‐produced H− ion beams in pulsed operation. To obtain high H− current densities (J−>250 mA/cm2), this source requires relatively high gas pressure and high discharge power. Experim
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::93c98d1a42b2ed5cff600985161b837f
https://doi.org/10.1063/1.1140359
https://doi.org/10.1063/1.1140359