Zobrazeno 1 - 2
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pro vyhledávání: '"S. Novosiadly"'
Publikováno v:
Фізика і хімія твердого тіла, Vol 20, Iss 3, Pp 311-317 (2019)
In this paper, the structure of GaAs FET on a silicon substrate, suitable for local integration in the local SOItechnologyand the method of its electrophysical diagnostics based on changes in the thermal resistance (RT), isanalyzed. It is known [3,4]
Externí odkaz:
https://doaj.org/article/b52e1eb84f464bfe8decc0de638ed432
Publikováno v:
Фізика і хімія твердого тіла, Vol 20, Iss 3, Pp 311-317 (2019)
In this paper, the structure of GaAs FET on a silicon substrate, suitable for local integration in the local SOI technology and the method of its electrophysical diagnostics based on changes in the thermal resistance (RT), is analyzed. It is known th