Zobrazeno 1 - 10
of 10
pro vyhledávání: '"S. N. Schauer"'
Publikováno v:
Journal of Electronic Materials. 23:991-996
The results of electrical and structural characterization of a GeMoW ohmic contact to n-type GaAs with a 100A thick, In0.5Ga0.5As cap layer are presented. Electrical characterization demonstrates ohmic behavior over a wide annealing temperature range
Publikováno v:
Materials Science and Engineering: B. 25:175-178
This paper demonstrates WTiAu as a thermally stable, low resistance, non-alloyed, emitter ohmic contact for GaAsAlGaAs heterojunction bipolar transistor applications. The minimum W layer thickness required for low contact resistance and long-term
Publikováno v:
Diamond and Related Materials. 3:672-676
Phosphorus-doped diamond films were grown from CH 4 and H 2 using d.c. and microwave plasmas with PH 3 as the dopant source. The P incorporation which was quantified using secondary ion mass spectrometry varies by more than two orders of magnitude fo
Autor:
Sezai Elagoz, Melanie W. Cole, H. S. Lee, W. H. Chang, R. P. Moerkirk, D. W. Eckart, S. N. Schauer, R. T. Lareau, Kenneth A. Jones, Roy Clarke, D. C. Fox, W. Vavra
Publikováno v:
Journal of Applied Physics. 72:4773-4780
The microstructure and electrical properties of nonalloyed epitaxial Au‐Ge contacts were studied. Ohmic behavior was obtained after a 3 h anneal at 320 °C with the lowest average contact resistance and specific contact resistivity found to be ∼0
Publikováno v:
Applied Physics Letters. 64:1094-1096
Phosphorus‐doped polycrystalline and homoepitaxial diamond films were grown using both microwave and dc plasma assisted chemical vapor deposition. P incorporation was quantified using secondary ion mass spectrometry, and was approximately ten times
Autor:
L. Calderon, H. S. Lee, L. W. Yang, R. P. Moerkirk, W. Y. Han, J. R. Flemish, Kenneth A. Jones, Yicheng Lu, S. N. Schauer
Publikováno v:
Applied Physics Letters. 62:2578-2580
Two heavily carbon doped InGaAs samples (2.20×1019 and 1.92×1019 cm−3) with low In mol fractions (1% and 8%) were annealed with or without silicon nitride caps in H2 containing 0.3% AsH3 over the temperature range 5000–800 °C. Hall effect, sec
Autor:
R. P. Moerkirk, Melanie W. Cole, Yicheng Lu, S. N. Schauer, W. Y. Han, H. S. Lee, L. W. Yang, Kenneth A. Jones
Publikováno v:
Applied Physics Letters. 61:87-89
The hole concentrations and lattice mismatch with the GaAs substrate of heavily carbon‐doped epilayers (4.7×1019 and 9.8×1019 cm−3) were increased and the mobilities were decreased as compared with the as‐grown samples by rapid thermal anneal
Autor:
Li-Wu Yang, Yu Cun Lu, S. N. Schauer, Weiyu Han, Kenneth A. Jones, Robert P. Moerkirk, L. Calderon, H. S. Lee
Publikováno v:
SPIE Proceedings.
The hole carrier concentration of heavily carbon doped GaAs epilayers (4.7 X 1019 and 9.8 X 1019 cm-3) was increased and the mobility and lattice parameter were decreased by rapid thermal annealing silicon nitride capped samples at temperatures from
Autor:
Guillermo M. Loubriel, Wayne H. Chang, Charles D. Mulford, S. N. Schauer, Fred J. Zutavern, Robert J. Zeto, A. M. Balekdjian, R. T. Lareau
Publikováno v:
SPIE Proceedings.
A process was developed for the fabrication of high power GaAs photoconductive switches with ohmic Ni/Ge/Au contact metallization in a lateral NIN switch configuration. The main features of the process were ion implanted silicon in the contact region
Autor:
Sezai Elagoz, H. S. Lee, R. T. Lareau, Roy Clarke, S. N. Schauer, W. Va Vra, R. P. Moerkirk, Kenneth A. Jones
Publikováno v:
MRS Proceedings. 240
A SIMS backside sputter depth-profile technique using marker layers is employed to characterize the diffusion profiles of the Ge, As, and Au in the Au-Ge contacts after annealing at 320 C for various times. This technique overcomes difficulties such