Zobrazeno 1 - 10
of 98
pro vyhledávání: '"S. Massoud-Ansari"'
Autor:
S. Massoud-Ansari, R. Schneider, Douglas Ray Sparks, J. Cripe, N. Najafi, A. Chimbayo, Richard Thayre Smith
Publikováno v:
Sensors and Actuators A: Physical. 107:119-124
A new microfluidic system for measuring the density and specific gravity of a fluid has been developed. Measurements can be made with under a microliter of sample fluid. The syringe loaded system includes a dynamic temperature control system employin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::53ab53dce619d705f706b90c67774559
https://doi.org/10.1016/s0924-4247(03)00350-9
https://doi.org/10.1016/s0924-4247(03)00350-9
Publikováno v:
IEEE Transactions on Advanced Packaging. 26:277-282
A new approach to vacuum packaging of micro-machined resonant, tunneling, and display devices is covered in this paper. A multi-layer, thin-film getter, called a NanoGetter, which is particle free and does not increase the chip size of the microsyste
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3d83782e0d4fe2e14aa30521244c9e33
https://doi.org/10.1109/tadvp.2003.817964
https://doi.org/10.1109/tadvp.2003.817964
Publikováno v:
2004 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
A new microfluidic system for measuring the mass flow rate, dose, chemical concentration, fluid density, specific gravity and temperature has been developed. Vacuum packaged, resonating silicon microtubes are employed to form both a Coriolis mass flo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::958d5d5de0aa69a860550efb9d485ab3
https://doi.org/10.31438/trf.hh2004.19
https://doi.org/10.31438/trf.hh2004.19
Autor:
Richard Thayre Smith, N. Najafi, S. Massoud-Ansari, R. Schneider, M. Straayer, Douglas Ray Sparks, J. Cripe
Publikováno v:
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).
A new microfluidic system for measuring chemical concentration, fluid density and specific gravity has been developed. Measurements can be made with under a microliter of sample fluid, which is over 1000 to 3000X less than that required in convention
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fdc43bfd170aa3947c5849ca31377b65
https://doi.org/10.1109/sensor.2003.1215312
https://doi.org/10.1109/sensor.2003.1215312
Publikováno v:
Proceedings of Ninth International Workshop on Micro Electromechanical Systems.
Design and fabrication of an electrostatic vertical actuator is reported. This actuator has been constructed using a multi-level, LIGA-like process. The process uses diamond lapping and polishing for replanarization of electroplated surfaces after th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aff2eecbc5de9c6f20c44ca055a887d1
https://doi.org/10.1109/memsys.1996.493995
https://doi.org/10.1109/memsys.1996.493995
Publikováno v:
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).
This paper reports the development of a family of ultrasensitive and ultra-high-vacuum absolute capacitive pressure sensors, fabricated using the dissolved wafer process technology (DWP). One type of the sensors offers the following characteristics:
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::01f59703cf0819697b77a2064764fa77
https://doi.org/10.1109/memsys.2001.906506
https://doi.org/10.1109/memsys.2001.906506
Autor:
J. Klein, D.P. Siddons, J.D. Zook, T.R. Christenson, E.D. Johnson, H. Guckel, T. Earles, P.S. Mangat, H. Emmerich, S. Massoud-Ansari, Thomas R. Ohnstein
Publikováno v:
1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::44ab7adbf0faa7d0abb3a22631862d25
https://doi.org/10.31438/trf.hh1996.14
https://doi.org/10.31438/trf.hh1996.14
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