Zobrazeno 1 - 2
of 2
pro vyhledávání: '"S. M. Kalugin"'
Publikováno v:
Measurement Techniques. 61:955-958
The technology of microelectronic resistive gas sensors is considered. Heater and thermistor contacts are formed on an oxidized silicon substrate by sputtering a nichrome film and subsequent photolithography in combination with reactive magnetron spu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2edd931d497348b687c8a958ba2d1c08
https://doi.org/10.1007/s11018-018-1532-0
https://doi.org/10.1007/s11018-018-1532-0
Autor:
S. M. Kalugin, O. B. Sarach, A. A. Tevjashov, D. A. Stroganov, A. M. Guljaev, Russian Space Systems, V. A. Kotov
Publikováno v:
Izmeritel`naya Tekhnika. :70-72
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5fc53d31b5212c2289fdd8b9b496efad
https://doi.org/10.32446/0368-1025it.2018-9-70-72
https://doi.org/10.32446/0368-1025it.2018-9-70-72