Zobrazeno 1 - 4
of 4
pro vyhledávání: '"S. J. N. Mitchell"'
Publikováno v:
Journal of Micromechanics and Microengineering. 13:557-562
This paper describes the structure, fabrication and detailed characterization of a polycrystalline silicon passive microvalve. The microvalves were fabricated utilizing micromachining techniques, and automated measurement systems were developed for d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5175790d1b8f095770aa124d38fb958a
https://doi.org/10.1088/0960-1317/13/5/305
https://doi.org/10.1088/0960-1317/13/5/305
Autor:
H. Gamble, B. M. Armstrong, P. T. Baine, Y. H. Low, P. V. Rainey, S. J. N. Mitchell, D. W. McNeill
Publikováno v:
Semiconductor-On-Insulator Materials for Nanoelectronics Applications ISBN: 9783642158674
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::78fee2e6be0d648c390b5cfa9b54ad40
https://doi.org/10.1007/978-3-642-15868-1_1
https://doi.org/10.1007/978-3-642-15868-1_1
Publikováno v:
Springer Proceedings in Physics ISBN: 9783642763878
Springer Proceedings in Physics
Springer Proceedings in Physics
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d75bbbcecbc55059c6dfcd75a32945e3
https://doi.org/10.1007/978-3-642-76385-4_43
https://doi.org/10.1007/978-3-642-76385-4_43