Zobrazeno 1 - 10
of 17
pro vyhledávání: '"S. J. Ingrey"'
Autor:
S. J. Ingrey, William D. Westwood
Publikováno v:
Applied optics. 15(3)
Autor:
G. M. Smith, A. Majeed, J. T. Szymanski, S. J. Ingrey, D. Macquistan, Anthony J. SpringThorpe, I. C. Bassignana
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 11:1032
Pyrolytic boron nitride crucibles, used for the containment of aluminum in molecular‐beam epitaxy systems, are attacked by the molten metal. The reaction appears to be self‐limiting, with the formation of a coating of aluminum nitride on the cruc
Publikováno v:
Journal of Vacuum Science and Technology. 11:381-384
Films of Ta2O5 have been prepared by reactive sputtering of tantalum in argon-oxygen dc glow discharges. Such films are of interest for capacitor dielectrics and optical waveguides, and for both applications the films must be free of pores. The effec
Publikováno v:
Journal of Vacuum Science and Technology. 17:485-488
Thin film transistors (TFTs) are of current interest for addressing large‐area flat panel displays. In most cases, in‐vacuum mechanical masking and successive evaporations in a single pumpdown have been used to define the necessary patterns. Whil
Publikováno v:
Journal of Applied Physics. 50:5624-5629
The resistivity of CdSe thin films, vapor deposited on insulating substrates, has been reduced by more than two orders of magnitude by irradiation with a cw argon‐ion laser. A threshold power density of about 0.6 W for a beam diameter of 250 μm is
Publikováno v:
Thin Solid Films. 35:1-9
Nitrogen-doped tantalum films were deposited by d.c. sputtering in a semicontinuous d.c. diode system. Their electrical properties varied with nitrogen in a similar manner to that generally reported; e.g. the resistivity first decreased from 200 μω
Publikováno v:
Thin Solid Films. 30:377-381
The dielectric properties of amorphous films prepared by reactively sputtering tantalum in oxygen-nitrogen mixtures have been measured. As the nitrogen content in the sputtering discharge was increased, the dielectric constant decreased from 26 to 16
Publikováno v:
Journal of Vacuum Science and Technology. 17:481-484
The effect of thermal annealing of CdSe and multilayer Cr/CdSe thin films has been studied by Auger spectroscopy and nuclear reaction analysis. Films with thicknesses from 0.05 to 0.3 μm were deposited by evaporation onto glass and platinum substrat
Autor:
S. J. Ingrey, W. D. Westwood
Publikováno v:
Journal of Vacuum Science and Technology. 14:196-199
The refractive indexes of reactively sputtered Ta2O5Nx waveguides can be controlled by adjustment of the fraction (r) of O2 in the N2/O2 gas mixture during deposition. We have extended this work by studying the effect of varying the distance (z) and
Publikováno v:
Journal of Applied Physics. 64:3792-3798
Consistent preservation of 〈011〉‐oriented grating corrugations with 2850‐A period and 1500‐A height on (100) InP substrates has been achieved during thermal cycling at 660 °C for 60 min in a H2 ambient, using roughened GaAs cover slices. I