Zobrazeno 1 - 6
of 6
pro vyhledávání: '"S. I. Anevsky"'
Publikováno v:
Российский технологический журнал, Vol 10, Iss 3, Pp 34-44 (2022)
Objectives. In order to solve fundamental metrological problems concerning the reproduction and transmission of spectral radiometry units, as well as developing methods and tools for metrological support of modern technologies such as nanophotolithog
Externí odkaz:
https://doaj.org/article/a9f4994747694d6e8d63d2bdab69f642
Publikováno v:
Российский технологический журнал, Vol 9, Iss 1, Pp 38-47 (2021)
The investigations of multilayer surface nanostructures characteristics was performed with synchrotron radiation sources, characterized by an intensive, calculated continuum. It plays an important role in nanoelectronics metrological base. The main r
Externí odkaz:
https://doaj.org/article/1c40bc745f0d4d408425e59026727867
Autor:
D. S. Senin, R. V. Minaev, S. I. Anevsky, I. V. Drobkov, D. N. Lashkov, O. A. Minaeva, Yu. V. Tsvetkov, B. S. Volkov
Publikováno v:
Measurement Techniques. 53:764-771
We describe methods and instrumentation that we have developed for measuring the radiance distribution over the emitting region of plasma emitters in the extreme vacuum ultraviolet region. The radiance comparator for vacuum and near ultraviolet radia
Autor:
O. A. Minaeva, V. M. Lakhov, V. N. Krutikov, V. S. Ivanov, Yu. M. Zolotarevskii, S. I. Anevsky, R. V. Minaev
Publikováno v:
Measurement Techniques. 53:772-777
We describe methods for using synchrotron radiation to study the metrological characteristics of multilayer nanostructures to be used as optical filters in the extreme vacuum ultraviolet range for solving nanoelectronics problems. For the synchrotron
Publikováno v:
Physica Scripta. 35:623-627
The use of the synchrotron radiation (SR) in the vacuum ultraviolet (VUV) spectroscopy and radiometry opens new doors for a researcher. In this connection a consideration of SR characteristics of small size specialized SR sources, which can be availa
Publikováno v:
SPIE Proceedings.
The paper describes the operating principles and design features of the "Troll" strongmagnetic field synchrotron which is used as a generator of picosecond synchrotron radiationpulses. The results of using the synchrotron in the calibration of high s