Výsledky vyhledávání - "S. G. Simakin"

Angular Dependences of Silicon Sputtering by Gallium Focused Ion Beam

Autor: A. B. Churilov, A. S. Rudy, D. E. Pukhov, M. A. Smirnova, S. G. Simakin, I. V. Zhuravlev, V. I. Bachurin

Publikováno v: Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 14:784-790

Angular dependences of the surface layer composition and the sputtering yield of silicon upon irradiation of the surface with a focused beam of gallium ions with an energy of 30 keV are obtained. The surface composition is analyzed by scanning Auger

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::86abca5c6b897e8c33d7ecc8c4d7a891
https://doi.org/10.1134/s1027451020040229

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Structural Perfection and Composition of Gallium-Doped Thermomigration Silicon Layers

Autor: I. L. Shul’pina, S. G. Simakin, A. N. Zaichenko, S. Yu. Martyushov, B. M. Seredin, Andrey A. Lomov

Publikováno v: Technical Physics Letters. 46:279-282

A technique that allows one to form thick thermomigration silicon layers heavily doped with gallium for prospective power electronic devices is proposed. The dependences of the perfection of structure and the composition of the layers on the temperat

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::2fd98e676611b2904b848cae78e10d9b
https://doi.org/10.1134/s1063785020030268

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Effect of the Pressure of Oxygen on the Plasma Oxidation of the Titanium Nitride Surface

Autor: V. V. Naumov, S. G. Simakin, V. M. Mordvintsev

Publikováno v: Russian Microelectronics. 48:402-408

The dependences of the thickness of the TiO2 layer formed on the TiN surface on a partial pressure (flow) of oxygen in an argon-oxygen plasma of a magnetron sputtering system are established by secondary-ion mass spectrometry. The obtained dependence

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::08d2d50dcda95c7b45a6eedd1982c599
https://doi.org/10.1134/s1063739719060064

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Depth Profiling of Layered Si−O−Al Thin Films with Secondary Ion Mass Spectrometry and Rutherford Backscattering Spectrometry

Autor: E. O. Parshin, A. S. Rudy, A. A. Mironenko, V. I. Bachurin, A. B. Churilov, S. G. Simakin, N. S. Melesov

Publikováno v: Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 13:300-305

The results of depth profiling a four layered Si–O−Al thin film with different concentrations of elements in the layers are presented. Secondary-ion mass spectrometry (SIMS) and Rutherford backscattering (RBS) facilities are used to obtain the de

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::51eea404bc8fe9eee336c78ee197def7
https://doi.org/10.1134/s102745101902023x

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Quality Control of a Multilayer Spin-Tunnel Structure with the Use of a Combination of Analytical Methods

Autor: S. V. Vasiliev, Oleg Trushin, S. G. Simakin, E. A. Smirnov

Publikováno v: Russian Microelectronics. 47:381-387

Several experimental methods for controlling the quality of the multilayer film structures used for the fabrication of magnetic tunneling junctions (MTJs) are considered. A multilayer magnetoresistive structure of the following composition is deposit

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::9559459d07b02b9b8e5b47b3f4bd4891
https://doi.org/10.1134/s1063739718060094

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Secondary ion mass spectrometry study of the formation of a nanometer oxide film on a titanium nitride surface

Autor: V. V. Naumov, S. G. Simakin, V. M. Mordvintsev

Publikováno v: Russian Microelectronics. 45:242-255

Using secondary ion mass spectrometry, we investigate the oxidation of titanium nitride films fabricated by reactive magnetron sputtering under specific conditions of burning plasma in the argon and oxygen mixture in a vacuum chamber of a magnetron s

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::af0d194d53f15a2c14f384906bea3ba5
https://doi.org/10.1134/s1063739716040065

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Geochemical features and age of baddeleyite from carbonatites of the Proterozoic Tiksheozero alkaline–ultramafic pluton, North Karelia

Autor: A. V. Antonov, N. V. Rodionov, S. G. Simakin, Sergey Sergeev, Boris Belyatsky

Publikováno v: Doklady Earth Sciences. 464:1039-1043

On the basis of the local composition, baddeleyite grains that were less altered due to interaction with an alkaline melt and corresponded to the primary stage of crystallization of the intrusion were selected from the carbonatite intrusion of the Pr

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::c84b22a9ac35c3263b5df797f4c5d6af
https://doi.org/10.1134/s1028334x15100086

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Composition and origin of a K2O-rich granite melt in the Mid-Atlantic Ridge, 13°34′ N: Evidence from the analysis of melt inclusions and minerals of the gabbro-plagiogranite association

Autor: V. Yu. Prokofiev, L. Ya. Aranovich, A. N. Pertsev, N. S. Bortnikov, Olga Ageeva, V. E. Beltenev, S. G. Simakin, S. E. Borisovsky

Publikováno v: Doklady Earth Sciences. 460:174-178

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::27687c730d6178596f8b8081f37f6fd9
https://doi.org/10.1134/s1028334x15020166

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Magnetomigration effect during the annealing of granular cobalt-copper films

Autor: D. A. Kokanov, S. G. Simakin, E. Yu. Buchin, V. V. Naumov

Publikováno v: Technical Physics Letters. 40:145-148

We have studied the influence of long-term low-temperature (220°C) annealing in a constant magnetic field on the composition of granular cobalt-copper (Co-Cu) alloy films deposited by the ion-plasma method onto hot silicon substrates. The magnetic-f

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::46047d2bcd3b2ee52eff2d6b0b68caaf
https://doi.org/10.1134/s1063785014020187

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Magnetomigration in granular cobalt-copper films deposited by the ion-plasma method

Autor: S. G. Simakin, D. A. Kokanov, E. Yu. Buchin, V. V. Naumov

Publikováno v: Technical Physics Letters. 39:556-559

We have studied the effect of a constant magnetic field on the structure and composition of cobalt-copper (Co-Cu) granular alloy films deposited by the ion-plasma method. The phenomenon of magnetomigration of the main components and impurities has be

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::5fe7f6acb4f0fee520976114d844ee8d
https://doi.org/10.1134/s1063785013060175

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