Zobrazeno 1 - 4
of 4
pro vyhledávání: '"S. D. Starikov"'
Autor:
S. D. Starikov, Vladimir N. Polkovnikov, S. Yu. Zuev, Yu. A. Vainer, M. M. Barysheva, N. N. Salashchenko
Publikováno v:
Bulletin of the Russian Academy of Sciences: Physics. 77:24-27
The results from measuring reflection factors are presented for multilayer La/B4/C mirrors with barrier layers of carbon and scandium. It is shown that a higher reflection factor is obtained by depositing a layer of carbon onto a surface of boron car
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::902e59e290e8cc6b069eaf88c9b590bf
https://doi.org/10.3103/s1062873813010036
https://doi.org/10.3103/s1062873813010036
Publikováno v:
Bulletin of the Russian Academy of Sciences: Physics. 78:61-63
Recent results from manufacturing multilayer La/B4C mirrors at wavelengths above 6.7 nm with carbon barrier layers are presented. It is shown that maximum reflection R = 58.6% is attained at λ = 6.661 nm.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::28473aad28001fb8e5b0535cc6de6d2c
https://doi.org/10.3103/s1062873814010146
https://doi.org/10.3103/s1062873814010146
Autor:
I. A. Kas’kov, L. A. Suslov, N. N. Salashchenko, I. G. Zabrodin, Vladimir N. Polkovnikov, E. B. Klyuenkov, S. D. Starikov, B. A. Zakalov
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 7:637-639
The paper describes a new apparatus for the magnetron and ion-beam synthesis of multilayer structures. The process parameters and operating conditions are presented, and the expected effects are discussed.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4a29c3971fa9cb258d94131711f752c7
https://doi.org/10.1134/s1027451013040204
https://doi.org/10.1134/s1027451013040204
Autor:
S. Künstner, N. N. Salashchenko, N. I. Chkhalo, Vladimir N. Polkovnikov, Franz Schäfers, S. D. Starikov
Publikováno v:
Applied Physics Letters. 102:011602
Results on optimization and manufacturing of La/B4C multilayers are reported. Such mirrors are promising optical elements for the development of the next generation of nano-lithography at an operation wavelength of 6.7 nm. A near-normal incidence ref
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4e761ecb850c7ffd4918cdd42674a86a
https://doi.org/10.1063/1.4774298
https://doi.org/10.1063/1.4774298