Zobrazeno 1 - 3
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pro vyhledávání: '"S. D. Bernstein"'
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 17:571-576
The effects of substrate temperature on the crystallographic, electrical, and mechanical properties of ion beam (IBS) and magnetron sputtered (MS) Fe films on (100) GaAs were studied and compared. Films were deposited at substrate temperatures rangin
Publikováno v:
Journal of Applied Physics. 72:4358-4365
Fe films were deposited on (100) GaAs substrates by magnetron sputtering. Bombardment of the films during growth by energetic particles from the plasma had a significant impact on film properties including resistivity, crystallographic orientation, a
Autor:
S. D. Bernstein, R. W. Tustison
Publikováno v:
Applied Physics Letters. 55:501-503
Highly oriented, near‐stoichiometric films of YBa2Cu3O7−δ have been deposited onto (100) MgO, (100) yttria‐stabilized zirconia, and (110) SrTiO3 by ion beam sputtering from a single, off‐stoichiometric target. Their crystal structure and res