Zobrazeno 1 - 10
of 16
pro vyhledávání: '"S. Chereckdjian"'
Publikováno v:
Proceedings of 15th IEEE/CHMT International Electronic Manufacturing Technology Symposium.
The ability of several advanced statistical process control (SPC) methods to monitor an advanced ion implanation center over a period of six weeks is investigated. Sheet resistance data plotted on Box and Whiskers and Cpk charts are compared to the t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::426e4b286b04e7acc683e6fcbeac9da1
https://doi.org/10.1109/iemt.1993.398196
https://doi.org/10.1109/iemt.1993.398196
Publikováno v:
Proceedings of 11th International Conference on Ion Implantation Technology.
There has been a great deal of interest in the Indium Gallium Arsenide (InGaAs) material system, both lattice matched to Indium Phosphide (InP) as well as material grown pseudomorphically on GaAs because of its importance to optoelectronic devices. I
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6529a9759f9c2076f2d16911ff29234f
https://doi.org/10.1109/iit.1996.586513
https://doi.org/10.1109/iit.1996.586513
Autor:
I. H. Wilson, S. Chereckdjian
Publikováno v:
Radiation Effects. 98:179-187
Parameters of relevance to ion beam lithography and ion implantation masking have been determined for two polymer resists, PMMA and Microposit 23M. These have been bombarded with 50 keV As+ at low power densities in order to avoid blister formation.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9795092a59bd5c8ebc91eefdc85cb59e
https://doi.org/10.1080/00337578608206110
https://doi.org/10.1080/00337578608206110
Autor:
I.H. Wilson, S. Chereckdjian
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 1:258-264
Evaporated aluminium films (typically 2500 A thick) were bombarded with a collimated beam of molecular oxygen ions at energies between 50 and 150 keV. Talystep measurements show a good correlation between the measured vertical surface expansion and t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9e3e1d39dbbf43f9f29be616d0c8ef15
https://doi.org/10.1016/0168-583x(84)90078-8
https://doi.org/10.1016/0168-583x(84)90078-8
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. :735-741
A geometrical theory is presented which divides the collision cascade into energy groups, each with a characteristic anisotropy in the distribution in space of knock-on trajectories. A simplified two group, four (quasi-two-dimensional) component anal
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dd298b159c42d3b90e818fa74d5c1112
https://doi.org/10.1016/0168-583x(85)90461-6
https://doi.org/10.1016/0168-583x(85)90461-6
Autor:
I.H. Wilson, S. Chereckdjian
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 13:426-433
Triple resonator measurements are presented of the sputtering yield and the lateral stress versus incident ion dose in the range of 100 KeV 10 13 –10 17 cm −2 for polycrystalline Au bombarded by 50 keV Ar + As + and Kr + ions and for amorphous Ge
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b5dee11c59b2f36d9628025249877a62
https://doi.org/10.1016/0168-583x(86)90541-0
https://doi.org/10.1016/0168-583x(86)90541-0
Autor:
S. Chereckdjian, I. H. Wilson
Publikováno v:
Materials Modification by High-fluence Ion Beams ISBN: 9789401070638
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::34bf1d62cc9c7e857320a5d02eccc953
https://doi.org/10.1007/978-94-009-1267-0_30
https://doi.org/10.1007/978-94-009-1267-0_30
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Akademický článek
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