Zobrazeno 1 - 10
of 55
pro vyhledávání: '"S. Buttgenbach"'
Broadband transitions for membrane-based coplanar waveguides on highly-conductive silicon substrates
Publikováno v:
Advances in Radio Science, Vol 10, Pp 13-18 (2012)
We present a transition from a contact structure built on highly-conductive silicon to a coplanar waveguide (CPW) fabricated in membrane technology. Test structures were fabricated and measured. The silicon-to-membrane transition is suitable for on-w
Externí odkaz:
https://doaj.org/article/d2c8997ece05488a899bce4daefcb9d8
Publikováno v:
Advances in Radio Science, Vol 9, Pp 19-26 (2011)
In this work we compare on-wafer calibration standards fabricated in membrane technology with standards built in conventional thin-film technology. We perform this comparison by investigating the propagation of uncertainties in the geometry and mater
Externí odkaz:
https://doaj.org/article/03cbad35564846c3804cfe3195d028a6
Publikováno v:
Advances in Radio Science, Vol 6, Pp 31-34 (2008)
RF voltage measurement based on electrostatic RMS voltage-to-force conversion is an alternative method in comparison to the conventional thermal power dissipation method. It is based on a mechanical force induced by an RF voltage applied to a micro-m
Externí odkaz:
https://doaj.org/article/e3e935e4d5f44d85bcbf1ab61243f95d
Publikováno v:
Mechatronics. 15:43-65
Beside a quantity of well-known positive characteristics parallel robots also obtain a couple of negative properties limiting their efficient use in certain application areas nowadays. Additional sensors integrated in the passive joints provide the p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c5382bd4db7bfe67e5d8fed60f7fca93
https://doi.org/10.1016/j.mechatronics.2004.07.004
https://doi.org/10.1016/j.mechatronics.2004.07.004
Publikováno v:
Journal of Microelectromechanical Systems. 9:551-556
In this paper, four different designs for a new three-axes monolithic low-g acceleration sensor are presented. The silicon spring mass system of the sensor is fabricated in a single step by anisotropic wet chemical etching in KOH using [111] planes a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c33d10b9373b48bc9a817b995d355bc9
https://doi.org/10.1109/84.896778
https://doi.org/10.1109/84.896778
Autor:
S. Buttgenbach, Andreu Llobera, S. Biittgenbach, Kirill Zinoviev, Carlos Domínguez, J. Vila, Victor J. Cadarso, José Antonio Plaza
Publikováno v:
IEEE Photonics Technology Letters. 21:79-81
The optical and structural properties of poly(dimethylsiloxane) (PDMS) are considered to define disposable cantilever-based micooptoelectromechanical systems (MOEMS) by ways of soft lithography and with a high degree of monolithic integration. The ve
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::da9bbb02f140b30a5047016aa1ac4e32
https://doi.org/10.1109/lpt.2008.2008659
https://doi.org/10.1109/lpt.2008.2008659
Autor:
S. Buttgenbach, M. Feldmann
Publikováno v:
IEEE Transactions on Magnetics. 43:2567-2569
This paper reports on optimized fabrication technologies for electromagnetic actuator systems and their characterization. These actuators consist of three-dimensional microstructures of increasing complexity like electroplated micro coils, flux guida
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2b586ae38b18cf5375b656d393ff73fa
https://doi.org/10.1109/tmag.2007.894047
https://doi.org/10.1109/tmag.2007.894047
Publikováno v:
2013 Seventh International Conference on Sensing Technology (ICST).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::020f26ede51de23cac1cd9ddaec83a77
https://doi.org/10.1109/icsenst.2013.6727726
https://doi.org/10.1109/icsenst.2013.6727726
Publikováno v:
Sensors and Actuators A: Physical. 32:299-302
Micromechanical structures in silicon are usually fabricated by photolithography and anisotropic etching. While the shape and the size of the pattern on the wafer surface are defined by a masking layer, the dimension of the microstructures perpendicu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::44ddeaeb5009a875db297efecdd3018c
https://doi.org/10.1016/0924-4247(92)80002-k
https://doi.org/10.1016/0924-4247(92)80002-k
Autor:
S. Buttgenbach
Publikováno v:
2007 International Workshop on Physics of Semiconductor Devices.
The design and performance of exemplary microfluidic components and micro analysis systems enabling real time monitoring of chemical and biological agents will be described.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9348e3127d1b4f5e0d3a0c1ea06fe6e2
https://doi.org/10.1109/iwpsd.2007.4472605
https://doi.org/10.1109/iwpsd.2007.4472605