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Wafer scale manufacturing of high precision micro-optical components through X-ray lithography yielding 1800 Gray Levels in a fingertip sized chip

Autor: S. M. P. Kalaiselvi, E. X. Tang, H. O. Moser, M. B. H. Breese, S. P. Turaga, H. Kasi, S. P. Heussler

Publikováno v: Scientific Reports, Vol 12, Iss 1, Pp 1-12 (2022)

Abstract We present a novel x-ray lithography based micromanufacturing methodology that offers scalable manufacturing of high precision optical components. It is accomplished through simultaneous usage of multiple stencil masks made moveable with res

Externí odkaz: https://doaj.org/article/6023d1c181964efca40dfc8d43146390

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Wafer scale manufacturing of high precision micro-optical components through X-ray lithography yielding 1800 Gray Levels in a fingertip sized chip

Autor: S M P, Kalaiselvi, E X, Tang, H O, Moser, M B H, Breese, S P, Turaga, H, Kasi, S P, Heussler

Publikováno v: Scientific reports. 12(1)

We present a novel x-ray lithography based micromanufacturing methodology that offers scalable manufacturing of high precision optical components. It is accomplished through simultaneous usage of multiple stencil masks made moveable with respect to o

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=pmid________::7fd578f9db55c0a40e0b7436ef2b2eab
https://pubmed.ncbi.nlm.nih.gov/35177735

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