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Publikováno v:
Optics express. 27(5)
Displacement Talbot lithography (DTL) is a new technique for patterning large areas with sub-micron periodic features with low cost. It has applications in fields that cannot justify the cost of deep-UV photolithography, such as plasmonics, photonic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::5bfc51a9a0d464b7e4c39b3af13ce4a1
https://pubmed.ncbi.nlm.nih.gov/30876189
https://pubmed.ncbi.nlm.nih.gov/30876189
