Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Ryota Oyamada"'
Autor:
Ryota Oyamada, Takeshi Hizawa, Jose A. Piedra-Lorenzana, Rui Tsuchiya, Yasuhiko Ishikawa, Tetsuya Nakai, Takaaki Fukushima
Publikováno v:
IEEE Journal of Selected Topics in Quantum Electronics. 28:1-9
This study reports a SiN x channel optical waveguide on a SiO2-covered bulk Si platform. The waveguide shows a low propagation loss of ∼0.6 dB/cm at 1550 and 1310 nm wavelengths. The SiN x film is deposited by reactive sputtering and is free from N
Autor:
Mayu Tachibana, Shuhei Sonoi, Kyosuke Noguchi, Riku Katamawari, Ryota Oyamada, Kazuki Motomura, Takeshi Hizawa, Kazuki Kawashita, Yasuhiko Ishikawa
Publikováno v:
ECS Transactions. 104:147-155