Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Ryo Mimura"'
Autor:
Maxime G. Lemaitre, Ralf Jede, Joel Fridmann, Ryo Mimura, Jason E. Sanabia, S. Bauerdick, Brent P. Gila, Bill R. Appleton, Sefaattin Tongay, Paul Mazarov, L. Bruchhaus
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 272:153-157
Materials modification and nanofabrication results are reported from the use of a new multi-ion beam lithography and processing system developed by the University of Florida (UF) and Raith Inc. The UF system utilizes liquid metal alloy ion sources an
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 210:104-107
Three-dimensional Rutherford backscattering (RBS) analyses have been achieved in the nanometer range for both lateral and vertical resolution using a 200 kV focused ion beam (FIB) system. The ion-optical design of the FIB microprobe RBS analysis syst
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 181:335-339
Localized beam-processed areas using chemical reactions induced by a 30 keV Ga + focused ion beam (FIB) with and without I2 (etching) and (CH3)3CH3C5H5Pt gases (Pt deposition) have been analyzed using a 300 keV Be 2+ microprobe with a beam spot size
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 181:44-48
A time of flight (TOF) Rutherford backscattering (RBS) system with a nano-probe line has been designed and installed. A medium energy (100–400 keV) nano-probe with beam pulsing and multiscaling detecting techniques was used to obtain enhanced detec
Autor:
Ryo Mimura
Publikováno v:
Journal of the Japanese Association for Petroleum Technology. 61:287-291
Autor:
Ryo Mimura
Publikováno v:
RESOURCES PROCESSING. 43:68-75
Autor:
Brent Gila, Bill R. Appleton, Joel Fridmann, Paul Mazarov, Jason E. Sanabia, S. Bauerdick, Lars Bruchhaus, Ryo Mimura, Ralf Jede, Floyd D. McDaniel, Barney L. Doyle
Publikováno v:
AIP Conference Proceedings.
The University of Florida (UF) have collaborated with Raith to develop a version of the Raith ionLiNE IBL system that has the capability to deliver multi‐ion species in addition to the Ga ions normally available. The UF system is currently equipped
Autor:
Ryo Mimura
Publikováno v:
RESOURCES PROCESSING. 39:167-177
Publikováno v:
Japanese Journal of Applied Physics. 27:L2037
Distribution profiles and annealing characteristics of defects in GaAs induced by various (0.1–150 keV) energy Ga-focused ion-beam (FIB) irradiation were measured by means of deep-level transient spectroscopy and C-V carrier profiling to reveal the