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pro vyhledávání: '"Ryan Xie"'
Publikováno v:
SPIE Proceedings.
We present an improved method of phase retrieval from through-focus image series with higher precision and reduced sensitivity to noise. The previous method, developed for EUV, actinic mask measurements, was based on the Gerchberg-Saxton algorithm an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4ecf57b8bbfd919c432012b095d9a6c1
https://doi.org/10.1117/12.881652
https://doi.org/10.1117/12.881652
