Zobrazeno 1 - 10
of 11
pro vyhledávání: '"Ryan P. Callahan"'
Autor:
C. Grant Willson, Shiro Kusumoto, Charles R. Chambers, Brian Osborn, Willard E. Conley, Brian C. Trinque, Robert H. Grubbs, Ryan P. Callahan, Geun Su Lee, Daniel P. Sanders
Publikováno v:
Journal of Fluorine Chemistry. 122:17-26
An overview of our 157 nm photoresist development activities is presented. Examination of the vacuum ultraviolet (VUV) absorbances of fluorinated monomers and polymers has provided knowledge that influenced copolymer design so that resist transparenc
Publikováno v:
Synthesis. 1997:1056-1060
Autor:
Maurice E. Riner, Ryan P. Callahan, Dale F. Shellhamer, Cameron R. Youngstrom, Scott A. Shackelford, Steven L. Carter, Robert D. Chapman, Melvin L. Druelinger
Publikováno v:
Journal of the Chemical Society, Perkin Transactions 2. :787-794
The electrophilic reactivity of proposed alkoxyxenon fluoride (ROXeF) intermediates based on electronegatively substituted (polyfluorinated and polynitroaliphatic) alcohols has been characterized with model alkenes norbornene, 2-methylpent-1-ene and
Autor:
Vincent M. Lynch, Charles L. B. Macdonald, Axel Herzog, M. Frederick Hawthorne, Richard J. Lagow, Ryan P. Callahan
Publikováno v:
Angewandte Chemie International Edition. 40:2121-2123
Exhaustive fluorination of deca-B-methyl-para-carborane (1) furnishes perfluoro-deca-B-methyl-para-carborane (2) almost quantitatively [Eq. (1)]. Compound 2 represents the first neutral perfluorinated sphere mimicking a "Teflon ball". The properties
Publikováno v:
ChemInform. 29
Autor:
Ryan P. Callahan, Charles R. Chambers, C. Grant Willson, Scott M. Grayson, Brian Osborn, Shiro Kusomoto, Brian K. Long
Publikováno v:
The Journal of organic chemistry. 71(1)
[reaction: see text] Fluorinated norbornene monomers exhibit the requisite properties for inclusion in 157 nm photoresists, but traditional addition and radical polymerizations with these monomers have failed. Norbornanediols provide an alternate rou
Publikováno v:
SPIE Proceedings.
The introduction of 157nm lithography has raised many issues, not the least of which is the requirement of a new material for soft pellicle. At 157nm, the incident energy of 7.9 eV is enough to break any single organic bond. This makes the design of
Autor:
Carlton G Willson, Daniel Miller, Shiro Kumamoto, Ryan P. Callahan, Guen Su Lee, Brian Osborn, Charles R. Chambers, Brian C. Trinque, Paul Zimmerman, Will Conley, Matthew J. Pinnow, Stefan Caporale
Publikováno v:
Advances in Resist Technology and Processing XX.
The design of 157 nm photoresists is a daunting task since air, water, and most organic compounds are opaque at this wavelength. Spectroscopic studies1 led to the observation that fluorinated hydrocarbons and siloxanes offer the best hope for the tra
Autor:
Axel, Herzog, Ryan P., Callahan, Charles L. B., Macdonald, Vincent M., Lynch, M. Frederick, Hawthorne, Richard J., Lagow
Publikováno v:
Angewandte Chemie (International ed. in English). 40(11)
Autor:
Axel, Herzog, Ryan P, Callahan, Charles L B, Macdonald, Vincent M, Lynch, M Frederick, Hawthorne, Richard J, Lagow
Publikováno v:
Angewandte Chemie (International ed. in English). 40(11)
Exhaustive fluorination of deca-B-methyl-para-carborane (1) furnishes perfluoro-deca-B-methyl-para-carborane (2) almost quantitatively [Eq. (1)]. Compound 2 represents the first neutral perfluorinated sphere mimicking a "Teflon ball". The properties