Zobrazeno 1 - 10
of 16
pro vyhledávání: '"Ryan L. Burns"'
Autor:
Craig J. Hawker, Christopher M. Bates, Yuanyi Zhang, Mark Somervell, Emre H. Discekici, Ryan L. Burns
Publikováno v:
ACS Applied Polymer Materials. 2:481-486
Processes that enable selective deposition in thin films are desired for advanced patterning applications to reduce overlay demands, but conventional techniques are slow and limited in material sco...
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6a7823355ed0dd263519117ab6a6d5e7
https://doi.org/10.1021/acsapm.9b00914
https://doi.org/10.1021/acsapm.9b00914
Autor:
Yuanyi Zhang, Mark Somervell, Sean P. Berglund, Colton D'Ambra, Muramatsu Makoto, Rachel A. Segalman, Christopher M. Bates, Craig J. Hawker, Michael A. Carcasi, Lior Huli, Ryan L. Burns
Publikováno v:
Advances in Patterning Materials and Processes XXXVIII.
Bottom-up patterning approaches are gaining traction as the trade-offs between resolution, throughput, and cost continually run into limitations for advanced semiconductor manufacturing technologies. With these constraints in mind, we have previously
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1984cfce30751bf70c0b0958d7cbf30f
https://doi.org/10.1117/12.2583086
https://doi.org/10.1117/12.2583086
Autor:
Andrew Metz, David Hetzer, Nihar Mohanty, Subhadeep Kal, Carlos Fonseca, Ryan L. Burns, Xinghua Sun, Devillers Anton J, Cheryl Pereira, Angelique Raley, Akiteru Ko, Steven Scheer, Jeffrey Smith, Richard A. Farrell, Peter Biolsi, Lior Huli
Publikováno v:
SPIE Proceedings.
As the industry marches on onto the 5nm node and beyond, scaling has slowed down, with all major IDMs & foundries predicting a 3-4 year cadence for scaling. A major reason for this slowdown is not the technical challenge of making features smaller, b
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8414a480901e95c55f1a6019a09bcc0d
https://doi.org/10.1117/12.2258108
https://doi.org/10.1117/12.2258108
Autor:
Eui Kyoon Kim, C. Grant Willson, Michael D. Dickey, S. Johnson, Nick A. Stacey, Ryan L. Burns
Publikováno v:
AIChE Journal. 51:2547-2555
Step and Flash Imprint Lithography (SFIL) is a promising high-resolution, yet low-cost patterning technique that uses a UV induced photopolymerization to replicate features on a patterned template. The SFIL process utilizes an acrylate-based free rad
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4b247a487496140b51248099df51415e
https://doi.org/10.1002/aic.10477
https://doi.org/10.1002/aic.10477
Publikováno v:
Industrial & Engineering Chemistry Research. 43:5942-5949
Many previous studies have examined structure-property relationships of both polymeric and carbon molecular sieve gas separation membranes, which show a widely known tradeoff between permeability and selectivity. This work presents an explanation of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1bec346f145e3c8f72e3651f17d39fb1
https://doi.org/10.1021/ie049800z
https://doi.org/10.1021/ie049800z
Autor:
Ryan L. Burns, William J. Koros
Publikováno v:
Macromolecules. 36:2374-2381
Previous studies have examined polypyrrolone and polyimide membranes for gas separations. For the first time this study examines poly(pyrrolone-imide) copolymers for the O2/N2, CO2/CH4, and C3H6/C3H8 separation. Combining these two classes of polymer
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8e6cfe650702e34f6cdb3bbabb21b2b2
https://doi.org/10.1021/ma0259261
https://doi.org/10.1021/ma0259261
Autor:
William J. Koros, Ryan L. Burns
Publikováno v:
Journal of Membrane Science. 211:299-309
The separation of olefins from paraffins is energy intensive, and consequently polymer membrane based separations have been considered as an attractive alternative. Although much research has been conducted on polymer membranes for the C3H6/C3H8 sepa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4124e9c37e256e04027df39f647e2516
https://doi.org/10.1016/s0376-7388(02)00430-1
https://doi.org/10.1016/s0376-7388(02)00430-1
Publikováno v:
Journal of Applied Polymer Science. 86:881-890
Mixed matrix materials comprised of molecular sieve domains embedded in processable polymer matrices have the potential to provide membranes with higher permselectivity and equivalent productivity compared to existing membrane materials. It has been
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::644d739e8d50251fdf558744fd82f2f8
https://doi.org/10.1002/app.10998
https://doi.org/10.1002/app.10998
Autor:
Ian Stobert, Ryan L. Burns, Jason E. Meiring, James M. Oberschmidt, Scott M. Mansfield, Chidam Kallingal, Amr Abdo, Ramya Viswanathan, Klaus Herold
Publikováno v:
Optical Microlithography XXI.
The lithographic processes and resolution enhancement techniques (RET) needed to achieve pattern fidelity are becoming more complicated as the required critical dimensions (CDs) shrink. For technology nodes with smaller devices and tolerances, more c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::439e72f947b3eb65735cd8354a610f43
https://doi.org/10.1117/12.772902
https://doi.org/10.1117/12.772902
Autor:
Yuping Cui, Mohamed Gheith, Zengqin Zhao, Ian Stobert, Ryan L. Burns, Kareem Madkour, Ayman Yehia, Pat LaCour, Ahmed Seoud
Publikováno v:
SPIE Proceedings.
Current state-of-the-art OPC (optical proximity correction) for 2-dimensional features consists of optimized fragmentation followed by site simulation and subsequent iterations to adjust fragment locations and minimize edge placement error (EPE). Int
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dcf3bc3767038e8fdc91bc172c3c23bd
https://doi.org/10.1117/12.656649
https://doi.org/10.1117/12.656649