Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Ryabyshenkov Andrei"'
Publikováno v:
2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus).
In this work using an extertological method of thermodynamic analysis of the air preparation and filtration system in clean rooms of microelectronics have been carried out.In this article two systems have been used: a direct flow system and using a h
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c8ec35965bb0a72263f4b4d26cefe23e
https://doi.org/10.1109/eiconrus.2019.8657289
https://doi.org/10.1109/eiconrus.2019.8657289
Publikováno v:
2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus).
The air conditioning and filtration systems of clean rooms of microelectronics are designed to maintain a specified class of purity in them. The purpose of this work is to analyze the efficiency of air purification in the main elements of the system.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8d4237b5b2a300273072e5662b6282e1
https://doi.org/10.1109/eiconrus.2018.8317483
https://doi.org/10.1109/eiconrus.2018.8317483
Conference
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