Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Ruud Van Den Boom"'
Autor:
Brigitte Parmentier, Gabriela Dilliway, Benny Van Daele, Olivier Richard, Eddy Simoen, Ruud Van Den Boom, Hugo Bender, Frederik Leys, Marc Meuris, Trudo Clarysse, Christophe Defranoux, A. Benedetti, Alain Moussa
Publikováno v:
ECS Transactions. 3:599-609
The in-situ fabrication of rectangular concentration-depth profiles of phosphorus in germanium, with electrically active concentrations approaching 1020 cm-3 is reported. The growth method is atmospheric chemical vapor deposition using germane and ph
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fea5b8ad6a603559bf8b726396f85c07
https://doi.org/10.1149/1.2355857
https://doi.org/10.1149/1.2355857
Publikováno v:
2012 IEEE International Interconnect Technology Conference.
Direct plating of Cu on Ru for dual damascene and high aspect ratio through-silicon via (TSV) structures requires high nucleation density and rapid coalescence of the Cu nuclei, which may be achieved by incorporating strong suppressors in the plating
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ba0f6b4011d4e320700398ce7b094134
https://doi.org/10.1109/iitc.2012.6251644
https://doi.org/10.1109/iitc.2012.6251644
Autor:
Gabriela DILLIWAY, Ruud van den BOOM, Renaud Bonzom, Frederik Leys, Benny Van Daele, Brigitte PARMENTIER, Trudo CLARYSSE, Eddy R. Simoen, Roger Loo, Marc M. Meuris, Wilfried Vandervorst, Matty R. Caymax
Publikováno v:
ECS Meeting Abstracts. :1464-1464
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9cfe6f73f12ef4eb9b859c8c103acd7e
https://doi.org/10.1149/ma2006-02/31/1464
https://doi.org/10.1149/ma2006-02/31/1464