Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Rustem Osmanov"'
Publikováno v:
SPIE Proceedings.
The most recent development in industrial fabrication processes of low temperature poly-silicon by means of excimer laser and optics system is presented: . The recently developed high performance excimer laser, which delivers the highest output power
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cc41523d6ec967edb3b3e5efa0c41576
https://doi.org/10.1117/12.481801
https://doi.org/10.1117/12.481801
Autor:
Rustem Osmanov, Eric E. Mayer, Dirk Basting, Evgueni V. Slobodtchikov, Michael Scaggs, Michael Fiebig, Uwe Stamm, Alexander O. Wiessner, Sergei V. Govorkov
Publikováno v:
SPIE Proceedings.
Over the last decades laser technology has found the way into various industries. For microfabrication specifically excimer lasers have developed to powerful manufacturing tools because of their short UV wavelengths as well as the progress in excimer
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::66a7fdb2927e335de0f606f073217e19
https://doi.org/10.1117/12.405697
https://doi.org/10.1117/12.405697
Autor:
Uwe Stamm, Juergen Kleinschmidt, Rainer Paetzel, Thomas Schroeder, Igor Bragin, Peter Lokai, Wolfgang Zschocke, Martin Sprenger, Rustem Osmanov
Publikováno v:
SPIE Proceedings.
Results on the feasibility of highest repetition rate ArF lithography excimer lasers with narrow spectral bandwidth of less than 0.4 pm are presented. The current 193 nm lithography laser product NovaLine A2010 delivers output power of 10W at 2 kHz r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d0abdb07f4cff5aea49fa675237fcc77
https://doi.org/10.1117/12.388976
https://doi.org/10.1117/12.388976
Autor:
Peter Oesterlin, Frank Vofl, Rustem Osmanov, Michael Fiebig, L. Uzuka, Uwe Stamm, Naoyuki Kobayashi, Burkhard Fechner
Publikováno v:
SPIE Proceedings.
TFT flat panel displays are rapidly increasing their share in the display market. Polycrystalline-silicon TFT technology is opening the door to highly reliable, high-resolution, high performance and large size Active Matrix Liquid Crystal Displays (A
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2ea560cce981082189fa83ca227fb633
https://doi.org/10.1117/12.377054
https://doi.org/10.1117/12.377054
Autor:
Klaus Vogler, Rustem Osmanov, Uwe Stamm, Juergen Kleinschmidt, Thomas Schroeder, Dirk Basting, Wolfgang Zschocke, Vincent Berger, Igor Bragin, I. Klaft, Rainer Paetzel
Publikováno v:
SPIE Proceedings.
With the transition of DUV lithography into mass production, the economics of the excimer laser light sources is getting more important. The efforts in the development are directed towards an increase of the laser's repetition rate and output power f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::21ed77577eb600077194a485eb7b1b55
https://doi.org/10.1117/12.354310
https://doi.org/10.1117/12.354310
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