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Autor:
Steve Bozeman, Viktor Kanarov, Ned Tabat, Rustam Yevtukhov, Jinsong Wang, Patrick J. Ryan, Paul E. Anderson, Alan V. Hayes, Hari Hegde, Adrian J. Devasahayam
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 17:2186
Thin film permanent magnet layers of Cr/CoCrPt were prepared by ion beam deposition in a Veeco IBD-350 tool. The magnetic properties were measured as a function of deposition angle, deposition energy, assist energy, and the underlayer and permanent m