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pro vyhledávání: '"Rustam M. Kalmykov"'
Autor:
Sergei P. Timoshenkov, Sergei A. Gavrilov, Rustam M. Kalmykov, Anton Boyko, O. Pyatilova, Dahir Gaev
Publikováno v:
SPIE Proceedings.
Study of new materials and composites based on porous silicon is of great interest for electronics and microelectronics industry. Functional characteristics of structured layers are closely associated with their morphology properties and treatment co
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::76a2221344b44a3df739871e8c4599cb
https://doi.org/10.1117/12.2267147
https://doi.org/10.1117/12.2267147
