Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Russell J. Serino"'
Factors affecting the interconnection resistance and yield in multilayer polyimide/copper structures
Autor:
W. Graham, Eileen A. Galligan, Sharon L. Nunes, C.-A. Chang, D.-Y. Shih, Janusz S. Wilczynski, John J. Ritsko, J. Lewis, Chandrasekhar Narayan, Laura Beth Rothman, J. Cataldo, Richard P Mcgouey, Helen Li Yeh, Alina Deutsch, Jurij R. Paraszczak, Eric D. Perfecto, Russell J. Serino
Publikováno v:
IEEE Transactions on Components, Hybrids, and Manufacturing Technology. 16:74-88
The use of a lift-off technique to fabricate a high-density structure consisting of multiple layers of metal/polyimide thin-film structures on a silicon substrate is described. To achieve better performance and high yield, the process design, the pro
Autor:
Eileen A. Galligan, D. Y. Shih, Russell J. Serino, Jurij R. Paraszczak, John Cataldo, Sharon L. Nunes
Publikováno v:
Journal of Applied Polymer Science. 46:1291-1299
The diffusion of an organic solvent, N-methylpyrollidinone (NMP), in a fully imidized photosensitive polyimide, 4,4′-benzophenone tetracarboxylic dianhydride (BTDA–tMDA), was investigated. The polyimide (PI) films were prepared by spin-coating, s
Autor:
W. Graham, G.V. Kopcsay, Sharon L. Nunes, Jurij R. Paraszczak, Janusz S. Wilczynski, J. Cataldo, Russell J. Serino, Eileen A. Galligan, Vincent Ranieri, D. Y. Shih, John J. Ritsko, Richard P Mcgouey, Alina Deutsch
Publikováno v:
IBM Journal of Research and Development. 34:601-615
This paper addresses some of the problems encountered in propagating high-speed signals on lossy transmission lines encountered in high-performance computers. A technique is described for including frequency-dependent losses, such as skin effect and
Autor:
Russell J. Serino, R. McGouey, Eileen A. Galligan, W. Graham, Sharon L. Nunes, J. Cataldo, D. Y. Shih, Jurij R. Paraszczak
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 8:1521-1528
A distinct difference in the solvent absorption behavior was observed in three types of polyimide films, the pyromellitic dianhydride–oxydianiline (PMDA‐ODA), the 3,3’,4,4’‐biphenyl tetracarboxylic diahydride‐p‐diaminophenyl (BPDA‐PDA
Autor:
Eric D. Perfecto, Jurij R. Paraszczak, John J. Ritsko, Laura Beth Rothman, Russell J. Serino, D. Y. Shih, Helen Li Yeh, C.-A. Chang, Chandrasekhar Narayan, Richard P Mcgouey, J. Lewis, Alina Deutsch, W. Graham, Sharon L. Nunes, Janusz S. Wilczynski, J. Cataldo, Eileen A. Galligan
Publikováno v:
1992 Proceedings 42nd Electronic Components & Technology Conference.
The use of a lift-off technique to fabricate a high-density structure consisting of multiple layers of metal/polyimide thin film structure on a silicon substrate is described. To achieve better performance and high yield, the authors evaluated the pr
Autor:
John J. Ritsko, W. Volksen, W. Graham, Donald C. Hofer, Richard P Mcgouey, J. W. Labadie, Sharon L. Nunes, J. L. Hedrick, Eileen A. Galligan, Katherine L. Saenger, G.V. Kopcsay, Jurij R. Paraszczak, Ronald D. Goldblatt, Russell J. Serino, Edward D. Babich, David F. Witman, Helen Li Yeh, Vincent Ranieri, Laura Beth Rothman, D. Y. Shih, Chandrasekhar Narayan, Janusz S. Wilczynski, J. Cataldo, Alina Deutsch, J. M. Shaw
Publikováno v:
1991 Proceedings 41st Electronic Components & Technology Conference.
Multilayer copper/polyimide interconnect structures were fabricated using a reactive-ion-etching-based lift-off technique. Conductor cross-sectional area control, planarity, and a gap-free structure were made possible by the use of a novel siloxane-p
Autor:
Janusz S. Wilczynski, J. Cataldo, John J. Ritsko, Richard P Mcgouey, Jurij R. Paraszczak, D.-Y. Shih, Gerard V. Kopcsay, W. Graham, Alina Deutsch, Sharon L. Nunes, Eileen A. Galligan, Russell J. Serino, Vincent Ranieri
Publikováno v:
SPIE Proceedings.
This paper discusses the maximum usable length (''max) for high-speed pulse propagation and its dependence on signal line resistance (R) for a range of wiring technologies. As an example we present results from measurements and analyses of experiment
Autor:
W. Graham, Sharon L. Nunes, J. Cataldo, Jurij R. Paraszczak, Eileen A. Galligan, R. McGouey, D. Y. Shih, Russell J. Serino
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 8:1038
The mechanism that governs the in‐plane solvent (N‐methyl pyrrolidinone) diffusion in a soluble polyimide [3,3’,4,4’‐benzophenone tetracarboxylic acid dianhydride and diaminophenylindane (BTDA‐DAPI)] lift‐off structure was investigated.
Autor:
W. Graham, Sharon L. Nunes, Jurij R. Paraszczak, J. Cataldo, R. Flitsch, D. Y. Shih, R. McGouey, J. Lewis, Russell J. Serino, N. Klymko, C. Yang, Eileen A. Galligan
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 7:1402-1412
The interaction of pyromellitic dianhydride–oxydianiline based polyamic acid precursor with copper was investigated under various curing conditions. Two reactions were found to occur at the interphase boundary during the curing cycle: the interacti