Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Rudye McGlothlin"'
Publikováno v:
Journal of Applied Physics. 83:3952-3971
We report a study of the repeatability as limited by instrumental imaging distortions in scanning-probe microscope (SPM) measurements of the heights of nominal 44 and 88 nm steps in calibration artifacts. By imaging the same series of locations on di
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c1ccb29b66a8ed59de251a15b511f070
https://doi.org/10.1063/1.367151
https://doi.org/10.1063/1.367151
Scanning capacitance spectroscopy: An analytical technique for pn-junction delineation in Si devices
Autor:
Vladimir A. Ukraintsev, R. Scott List, C. Ken Shih, Rachel Mahaffy, Hal Edwards, Elisa U, Richard San Martin, Michael Gribelyuk, Rudye McGlothlin
Publikováno v:
Applied Physics Letters. 72:698-700
Scanning capacitance spectroscopy (SCS), a variant of scanning capacitance microscopy (SCM), is presented. By cycling the applied dc bias voltage between the tip and sample on successive scan lines, several points of the high-frequency capacitance–
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::96a977fddb7695750a3b071cf135ad7f
https://doi.org/10.1063/1.120849
https://doi.org/10.1063/1.120849