Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Ruby E. Robertson"'
Publikováno v:
Applied Physics A. 77:175-184
Titanium carbide (TiC) is one of the preferred coatings for improving the performance of macroscopic moving mechanical components due to its established wear-resistance. Pulsed laser deposition (PLD) is an excellent method for depositing TiC, because
Publikováno v:
Thin Solid Films. :553-564
The application of wear-resistant coatings to microelectromechanical systems (MEMS) devices offers the potential of addressing the reliability of moving MEMS devices. However, coating non-line-of-sight, concealed surfaces in fully released 3D MEMS st
Publikováno v:
Tribology Letters. 8:133-137
Microelectromechanical systems (MEMS) are a key technology for small-scale satellites, integrated sensors, and intelligent control systems. However, a major limitation for Si-based systems involving tribological components is their inability to withs
Publikováno v:
SPIE Proceedings.
Titanium carbide (TiC) thin films have very desirable properties that make them ideally suited for applications to MEMS devices. TiC has been one of the preferred coatings for improving the performance of macroscopic moving mechanical components due
Publikováno v:
MRS Proceedings. 605
Microelectromechanical systems (MEMS) have been identified as a key technology for small-scale satellites, integrated sensors, and intelligent control systems. Using methods developed for highly integrated electronics, mechanical components are co-fa
Autor:
Ruby E. Robertson, Jeffrey Marks
Publikováno v:
Applied Physics Letters. 52:810-812
A new photochemical reaction for low‐temperature deposition of silicon dioxide has been developed. In this process silane is reacted with nitrogen dioxide in the presence of vacuum ultraviolet radiation. The electrical and mechanical properties of
Publikováno v:
SPIE Proceedings.
Variable temperature Hall and resistivity measurements have been used to monitor the changes in carrier behavior in p-type Hg1-xCdxTe when boron ions are implanted through photochemically deposited SiO2. The formation of an n-type layer is demonstrat
Publikováno v:
MRS Proceedings. 105
Three new reactions for depositing silicon dioxide at low temperatures using vacuum ultraviolet and ultraviolet radiation to initiate a reaction between silane and nitrogen dioxide have been developed. The optical and electrical properties of these f
Conference
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