Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Roya Dibaj"'
Publikováno v:
Microelectronics Reliability. 129:114464
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3aac2d7f0c88dfcedc038d3c44d7d134
https://doi.org/10.1016/j.microrel.2021.114464
https://doi.org/10.1016/j.microrel.2021.114464
Publikováno v:
Journal of Electronic Testing. 34:351-362
FinFET technology is one of the most promising candidates in replacing planar MOSFET beyond the 22 nm technology node. However, the complexity of FinFET manufacturing process has caused challenges in reliable device testing. Gate oxide short (GOS) is
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5390c3c61847ebc72444a715ec6c0f2a
https://doi.org/10.1007/s10836-018-5727-8
https://doi.org/10.1007/s10836-018-5727-8
Publikováno v:
VTS
Manufacturing complexities due to FinFET's three-dimensional structure and reduced critical dimensions have caused new challenges in achieving reliable device testing. Gate oxide short (GOS) is one of the defects that requires a thorough investigatio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::67ff0fe76b0ca5e4a369393f21a5dc01
https://doi.org/10.1109/vts.2017.7928960
https://doi.org/10.1109/vts.2017.7928960