Hot-filament metal oxide deposition (HFMOD): a novel method for depositing thin films of metallic oxides

Autor: Rouxinol, F. Paulo, Trasferetti, B. Cláudio, Landers, Richard, Moraes, Mário A. Bica de

Publikováno v: Journal of the Brazilian Chemical Society v.15 n.2 2004
Journal of the Brazilian Chemical Society
Sociedade Brasileira de Química (SBQ)
instacron:SBQ
Journal of the Brazilian Chemical Society, Volume: 15, Issue: 2, Pages: 324-326, Published: APR 2004

This short report describes a novel method for the synthesis of metal oxide thin films. The experimental setup consists of a metal filament installed inside a vacuum chamber. The filament can be heated by an ac power supply while oxygen is admitted i

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