Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Rotondaro, Antonio L.P."'
Publikováno v:
In Handbook of Silicon Wafer Cleaning Technology Edition: Third Edition. 2018:305-377
Autor:
Morais, Jonder, Rosa, Elisa Brod Oliveira da, Miotti, Leonardo, Pezzi, Rafael Peretti, Baumvol, Israel Jacob Rabin, Rotondaro, Antonio L.P., Bevan, M.J., Colombo, Luigi
Publikováno v:
Repositório Institucional da UFRGS
Universidade Federal do Rio Grande do Sul (UFRGS)
instacron:UFRGS
Universidade Federal do Rio Grande do Sul (UFRGS)
instacron:UFRGS
The effect of postdeposition annealing in vacuum and in dry O2 on the atomic transport and chemical stability of chemical vapor deposited ZrSixOy films on Si is investigated. Rutherford backscattering spectrometry, narrow nuclear resonance profiling,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______3056::9765a028437611677a19dd0bc1c76d95
Publikováno v:
Diffusion and Defect Data Part B: Solid State Phenomena; September 2016, Vol. 255 Issue: 1 p285-290, 6p
Autor:
Mbanaso, Chimaobi, Butterbaugh, Jeffery W., Becker, David Scott, Printz, Wallace P., Rotondaro, Antonio L.P., Bassett, Derek W., Thomes, Gregory P., Schwab, Brent D., Rathman, Christina Ann, Lauerhaas, Jeffrey M.
Publikováno v:
Diffusion and Defect Data Part B: Solid State Phenomena; September 2016, Vol. 255 Issue: 1 p195-200, 6p
Autor:
Bakhtari, Kaveh, Bearda, Twan, Beaudoin, Stephen P., Bigman, Joel L., Brown, Brian, Busnaina, Ahmed, Chabal, Yves J., Chen, Yufei, Cui, Hua, Florescu, Doru, Gale, Glenn W., Hess, Dennis W., Hues, Steven M., Kern, Werner, Knollenberg, Brian A., Lauerhaas, Jeffrey M., Lovejoy, Luke, Mertens, Paul W., Mikhaylichenko, Katrina, Muscat, Anthony J., Paluvai, Nagarjuna R., Park, Jin-Goo, Redeker, Fritz, Reidy, Richard F., Reinhardt, Karen A., Rodier, Daniel R., Rotondaro, Antonio L.P., Rupich, Sara M., Venkatesh, R. Prasanna
Publikováno v:
In Handbook of Silicon Wafer Cleaning Technology Edition: Third Edition. 2018:xi-xi