Zobrazeno 1 - 10 of 44 pro vyhledávání: '"Ross, A.W.S."'
1
Conference
Array Based Test Structure for Optical-Electrical Overlay Calibration.
Autor: Shulver, B.J.R., Allen, R.A., Walton, A.J., Cresswell, M.W., Stevenson, J.T.M., Smith, S., Bunting, A.S., Dunare, C., Gundlach, A.M., Haworth, L.I., Ross, A.W.S., Snell, A.J.
Publikováno v: 2007 IEEE International Conference on Microelectronic Test Structures; 2007, p165-170, 6p
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4
Conference
Improved test structures for the electrical measurement of feature size on an alternating aperture phase-shifting mask.
Autor: Smith, S., Walton, A.J., McCallum, M., Hourd, A.C., Stevenson, J.T.M., Ross, A.W.S.
Publikováno v: Proceedings of the 2005 International Conference on Microelectronic Test Structures, 2005 (ICMTS 2005); 2005, p17-22, 6p
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5
Conference
Suspended Greek cross test structures for measuring the sheet resistance of non-standard cleanroom materials.
Autor: Enderling, S., Brown, C.L., III, Smith, S., Dicks, M.H., Stevenson, J.T.M., Ross, A.W.S., Mitkova, M., Kozicki, M.N., Walton, A.J.
Publikováno v: Proceedings of the 2005 International Conference on Microelectronic Test Structures, 2005 (ICMTS 2005); 2005, p1-4, 4p
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6
Conference
Test structures for CD and overlay metrology on alternating aperture phase-shifting masks.
Autor: Smith, S., McCallum, M., Walton, A.J., Stevenson, J.T.M., Harris, P.D., Ross, A.W.S., Hourd, A.C., Jiang, L.
Publikováno v: Proceedings of the 2004 International Conference on Microelectronic Test Structures (IEEE Cat. No.04CH37516); 2004, p29-34, 6p
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7
Conference
Test structures for the electrical characterisation of platinum deposited by focused ion beam.
Autor: Smith, S., Walton, A.J., Bond, S., Ross, A.W.S., Stevenson, J.T.M., Gundlach, A.M.
Publikováno v: Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002 (ICMTS 2002); 2002, p157-162, 6p
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8
Conference
Evaluation of the issues involved with test structures for the measurement of sheet resistance and linewidth of copper damascene interconnect.
Autor: Smith, S., Walton, A.J., Ross, A.W.S., Bodammer, G.K.H., Stevenson, J.T.M.
Publikováno v: ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures (Cat. No.01CH37153); 2001, p195-200, 6p
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9
Conference
Design considerations for a test structure which can be used to determine the optimum focus.
Autor: Walton, A.J., Fallon, M., Stevenson, J.T.M., Ross, A.W.S.
Publikováno v: ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures; 1993, p275-280, 6p
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10
Conference
A modified Gaudi structure for the optimisation of the focus of wafer steppers.
Autor: Walton, A.J., Fallon, M., Stevenson, J.T.M., Ross, A.W.S., Reeves, C.M.
Publikováno v: Proceedings of 1994 IEEE International Conference on Microelectronic Test Structures; 1994, p81-84, 4p
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