Influence of the total gas flow on the deposition of microcrystalline silicon solar cells

Autor: Roschek, Tobias ^*, Rech, Bernd, Müller, Joachim, Schmitz, Ralf, Wagner, Heribert

Publikováno v: In Thin Solid Films 2004 451:466-469

Microcrystalline silicon solar cells prepared by 13.56 MHz PECVD : prerequisites for high quality material at high growth rates

Autor: Roschek, Tobias

Publikováno v: Jülich : Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag, Berichte des Forschungszentrums Jülich 4083, VIII, 106 p. (2003). = Düsseldorf, Univ., Diss., 2003

Topic of this thesis was the development of thin film solar cells based on microcrystalline silicon prepared by 13.56 MHz PECVD (plasma-enhanced chemical vapor deposition) at high deposition rates. Comprehensive solar cell studies, which were accompa

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od______3364::5fa2aa6be34adda3981d592eca750a7d
https://hdl.handle.net/2128/255

Amorphous and Microcrystalline Silicon Based Solar Cells and Modules on Textured Zinc Oxide Coated Glass Substrates.

Autor: Rech, Bernd, Müller, Joachim, Repmann, Tobias, Kluth, Oliver, Roschek, Tobias, Hüpkes, Jürgen, Stiebig, Helmut, Appenzeller, Wolfgang

Publikováno v: MRS Online Proceedings Library; 2003, Vol. 762 Issue 1, p1-11, 11p