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Autor:
Michael Nagli, Ron Moisseev, Nathan Suleymanov, Eitan Kaminski, Yoav Hazan, Gil Gelbert, Ilya Goykhman, Amir Rosenthal
Publikováno v:
Photoacoustics, Vol 32, Iss , Pp 100527- (2023)
Silicon photonics is an emerging platform for acoustic sensing, offering exceptional miniaturization and sensitivity. While efforts have focused on silicon-based resonators, silicon nitride resonators can potentially achieve higher Q-factors, further
Externí odkaz:
https://doaj.org/article/f496805395a94e0c9265465fe7724200