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Autor:
Roman Yu. Chaplinskiy, Anatoliy I. Kuzmichev, V. V. Tsiolko, Viktor M. Piun, Volodymir Yu. Bazhenov
Publikováno v:
IEEE Transactions on Plasma Science. 43:760-764
Characteristics of planar barrier radio frequency (RF) discharge in different modes at atmospheric pressure of Ar have been studied experimentally and theoretically. Experimental data, as well as results of numeric simulation, have shown a presence o