Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Roman V. Selyukov"'
Publikováno v:
Microsystem Technologies. 26:1971-1980
An important step in the MEMS switch fabrication is the formation of a suspended micron-sized beam. Typically, the beam is made of gold due to its high electrical conductivity and chemical inertness. However, the fabrication process is complicated by
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::95cf529448d00ac55ef2ec6a5fe93b8e
https://doi.org/10.1007/s00542-020-04748-2
https://doi.org/10.1007/s00542-020-04748-2
Publikováno v:
Sensors and actuators. A: Physical, 315:112346. Elsevier
Microfluidic systems require a compact actuator with low power consumption and high integration capability to drive pumps and valves. Electrochemical devices meet these criteria, but long time needed to terminate the gas makes them rather slow. Recen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::083551df0f4d46485a9972c4e4dfe6c3
https://doi.org/10.1016/j.sna.2020.112346
https://doi.org/10.1016/j.sna.2020.112346
Publikováno v:
SPIE Proceedings.
MEMS switch with the electrostatic actuation and the resistive contact was fabricated using surface micromachining. The movable electrode of the switch was the three-layer metallic cantilever having nanoscale thickness and high lengthto- thickness ra
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b45731f4e9b6bf9066c7a80afc9321c4
https://doi.org/10.1117/12.2179558
https://doi.org/10.1117/12.2179558
Publikováno v:
SPIE Proceedings.
New technology of obtaining of SOT-structures by ionic synthesis of buried silica glass layers has been proposed. This technology is based on physical processes of formation of a new phase that appears in ion-synthesized Si-B-O and Si-P-0 systems at
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8a02be439eae6a6204cd7e0848b00d28
https://doi.org/10.1117/12.677013
https://doi.org/10.1117/12.677013