Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Roman Lupták"'
Autor:
K. Cico, Andrej Vincze, Roman Lupták, Kristína Hušeková, Karol Fröhlich, Frantisek Uherek, Edmund Dobročka, D. Machajdík, M. Ťapajna
Publikováno v:
MRS Proceedings. 1155
We present analysis of thermal stability of thin GdScO3 films grown on silicon and InAlN/GaN substrates. The GdScO3 films were prepared by liquid injection metal organic chemical vapor deposition at 600 °C. The films were processed after deposition
Autor:
Johannes Lindner, Roman Lupták, U. Weber, Kristína Hušeková, Karol Fröhlich, Peter Baumann, Milan Ťapajna
Publikováno v:
Defects in High-k Gate Dielectric Stacks ISBN: 1402043651
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1c0c39f578b331171b20587099397a5b
https://doi.org/10.1007/1-4020-4367-8_22
https://doi.org/10.1007/1-4020-4367-8_22
Autor:
K. Cico, Karol Fröhlich, Kristína Hušeková, Roman Lupták, Edmund Dobročka, D. Machajdík, M. Jurkovič, Anna Mackova
Publikováno v:
ECS Meeting Abstracts. :2628-2628
We describe preparation and properties of GdScO3 thin films. The films were prepared by liquid injection metal-organic chemical vapor deposition, MOCVD at 600 ºC on (100) Si substrate. The as-deposited films were amorphous with a smooth surface and