Zobrazeno 1 - 10
of 33
pro vyhledávání: '"Roman Forke"'
Autor:
Chris Stoeckel, Katja Meinel, Marcel Melzer, Agnė Žukauskaitė, Sven Zimmermann, Roman Forke, Karla Hiller, Harald Kuhn
Publikováno v:
Micromachines, Vol 13, Iss 4, p 625 (2022)
Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al0.68Sc0.32N) are presented and compared regarding their static deflection. Two chip designs with 2 × 3 mm2 (Design 1) and 4 × 6 mm2 (Design 2) footprint with 60
Externí odkaz:
https://doaj.org/article/7e378ab13509479a84cca9571756db33
Autor:
Katja Meinel, Marcel Melzer, Chris Stoeckel, Alexey Shaporin, Roman Forke, Sven Zimmermann, Karla Hiller, Thomas Otto, Harald Kuhn
Publikováno v:
Sensors, Vol 20, Iss 22, p 6599 (2020)
A 2D scanning micromirror with piezoelectric thin film aluminum nitride (AlN), separately used as actuator and sensor material, is presented. For endoscopic applications, such as fluorescence microscopy, the devices have a mirror plate diameter of 0.
Externí odkaz:
https://doaj.org/article/da58e31c236243b88b42f124e299bb11
Autor:
Alexey Shaporin, Chris Stöckel, Marcel Melzer, Falk Schaller, Roman Forke, Sven Zimmermann, Harald Kuhn
Publikováno v:
2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::151ac13ea35d86036c1771d1cabfbf86
https://doi.org/10.1109/eurosime56861.2023.10100827
https://doi.org/10.1109/eurosime56861.2023.10100827
Publikováno v:
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::da18e36db3ec4a81d01ea3c0832fd3ec
https://doi.org/10.1109/inertial56358.2023.10103983
https://doi.org/10.1109/inertial56358.2023.10103983
Autor:
Martin Hoffmann, Philip Schmitt, Steffen Wittemeier, Falk Schaller, Alexey Shaporin, Chris Stöckel, Volker Geneiß, Roman Forke, Christian Hedayat, Ulrich Hilleringmann, Harald Kuhn, Sven Zimmermann
Publikováno v:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a80a46a8b67f51aa7a4e715839c5ebea
https://doi.org/10.1109/mems49605.2023.10052634
https://doi.org/10.1109/mems49605.2023.10052634
Publikováno v:
2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::22cb73a6f9fa1da2b310c7ac87bfe392
https://doi.org/10.1109/inertial53425.2022.9787750
https://doi.org/10.1109/inertial53425.2022.9787750
Autor:
Roman Forke, Karla Hiller, Susann Hahn, Alexey Shaporin, Sebastian Weidlich, Daniel Bulz, Matthias Kuchler, Danny Reuter, Christian Helke, Dirk Wunsch, Knut Gottfried, Harald Kuhn
Publikováno v:
2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e98957d7ce83b5d9dc2fdf29ac76f8f1
https://doi.org/10.1109/inertial53425.2022.9787762
https://doi.org/10.1109/inertial53425.2022.9787762
Autor:
Sebastian Pregl, Erhard Landgraf, Daniel Koehler, Steffen Bieselt, Claudia Hengst, Dirk Meinhold, Claus Dahl, Alexey Shaporin, Sebastian Weidlich, Dirk Wunsch, Susann Hahn, Roman Forke, Karla Hiller, Harald Kuhn
Publikováno v:
2022 Smart Systems Integration (SSI).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a75151a9ff0bb487cb7e61e3da4e661e
https://doi.org/10.1109/ssi56489.2022.9901438
https://doi.org/10.1109/ssi56489.2022.9901438
Autor:
Alexey Shaporin, Sebastian Weidlich, Dirk Wunsch, Susann Hahn, Roman Forke, Karla Hiller, Harald Kuhn
Publikováno v:
2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0093486ea41f2b15519779ea1d93b91a
https://doi.org/10.1109/eurosime54907.2022.9758898
https://doi.org/10.1109/eurosime54907.2022.9758898
Autor:
Petra Streit, Roman Forke, Sven Voigt, Uwe Schwarz, Roman Ziegenhardt, Sebastian Weidlich, Detlef Billep, Markus Gaitzsch, Harald Kuhn
Publikováno v:
2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3bd2f0f233914bd0ee4a9266e116ce6d
https://doi.org/10.1109/eurosime54907.2022.9758891
https://doi.org/10.1109/eurosime54907.2022.9758891