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Autor:
Mykhailo Dusheyko, Mykola Koliada, A. I. Ievtushenko, Vladyslav Lapshuda, Viktoriia Koval, V. A. Barbash, A. Ivashchuk, Sergii Mamykin, Roman Filov
Publikováno v:
2020 IEEE 40th International Conference on Electronics and Nanotechnology (ELNANO).
Molybdenum oxide thin films were synthesized by reactive ion beam sputtering technique. The effect of deposition temperature and annealing on surface morphology, electrical and optical parameters of molybdenum oxide thin films and heterojunctions bas