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pro vyhledávání: '"Roland Ruehl"'
Autor:
Roland Ruehl, Rakesh Vallishayee, Wojtek Wojciak, Dennis Ciplickas, Mariusz Niewczas, Brian E. Stine
Publikováno v:
SPIE Proceedings.
This paper presents the result of an extension to the concept of Micro-Yield modeling. We have developed a design attribute extraction and yield prediction software system that - given the characterization of a semiconductor process via complex test
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::da21c0ed4cc0c39c11abcc73328a0e5d
https://doi.org/10.1117/12.475671
https://doi.org/10.1117/12.475671
