Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Roland Fuessl"'
Autor:
Marcus Kaestner, Eberhard Manske, Ahmad Ahmad, Roland Fuessl, Mahmut Bicer, Ivo W. Rangelow, Claudia Lenk, Christoph Reuter, Steve Lenk, Mathias Holz, Alexander Reum, B. Erdem Alaca, Zahid A. K. Durrani, Tzvetan Ivanov, Elshad Guliyev, Michael Kuehnel, Matthias Budden, Thomas Fröhlich, Jens-Peter Zöllner, Cemal Aydogan, Martin Hofmann, Mervyn Jones
Publikováno v:
Proceedings of SPIE-The International Society for Optical Engineering
Cost-effective generation of single-digit nano-lithographic features could be the way by which novel nanoelectronic devices, as single electron transistors combined with sophisticated CMOS integrated circuits, can be obtained. The capabilities of Fie
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e2b11d5dc22fac15eb5a404c4ef5bd2c
https://doi.org/10.1117/12.2299955
https://doi.org/10.1117/12.2299955
Autor:
Tzvetan Ivanov, Andreas Schuh, Nataliya Vorbringer-Doroshovets, F. Balzer, Marcus Kaestner, Elshad Guliyev, Ivo W. Rangelow, Eberhard Manske, Manuel Hofer, Ahmad Ahmad, Jens-Peter Zoellner, Roland Fuessl
High Performance Single Nanometer Lithography (SNL) is an enabling technology for beyond CMOS and future nanoelectronics. To keep on with scaling down nanoelectronic components, novel instrumentation for nanometer precise placement, overlay alignment
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6adc61d8e64b1d940b8e7acb80f63bbc
