Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Rokitski, Slava I."'
Autor:
Purvis, Michael, Fomenkov, Igor V., Schafgans, Alexander A., Vargas, Mike, Rich, Spencer, Tao, Yezheng, Rokitski, Slava I., Mulder, Melchior, Buurman, Erik, Kats, Michael, Stewart, Jayson, LaForge, Andrew D., Rajyaguru, Chirag, Vaschenko, Georgiy, Ershov, Alex I., Rafac, Robert J., Abraham, Mathew, Brandt, David C., Brown, Daniel J.
Publikováno v:
Proceedings of SPIE; 1/11/2018, Vol. 10583, p1-10, 10p
Autor:
Panning, Eric M., Goldberg, Kenneth A., Schafgans, Alexander A., Brown, Daniel J., Fomenkov, Igor V., Tao, Yezheng, Purvis, Michael, Rokitski, Slava I., Vaschenko, Georgiy O., Rafac, Robert J., Brandt, David C.
Publikováno v:
Proceedings of SPIE; April 2017, Vol. 10143 Issue: 1 p101431I-101431I-1, 912881p
Industrialization of a robust EUV source for high-volume manufacturing and power scaling beyond 250W
Autor:
Goldberg, Kenneth A., Felix, Nelson M., Purvis, Michael, Fomenkov, Igor V., Schafgans, Alexander A., Vargas, Mike, Rich, Spencer, Tao, Yezheng, Rokitski, Slava I., Mulder, Melchior, Buurman, Erik, Kats, Michael, Stewart, Jayson, LaForge, Andrew D., Rajyaguru, Chirag, Vaschenko, Georgiy, Ershov, Alex I., Rafac, Robert J., Abraham, Mathew, Brandt, David C., Brown, Daniel J.
Publikováno v:
Proceedings of SPIE; March 2018, Vol. 10583 Issue: 1 p1058327-1058327-10