Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Rockhyun Baek"'
Autor:
Sanguk Lee, Jinsu Jeong, Bohyeon Kang, Seunghwan Lee, Junjong Lee, Jaewan Lim, Hyeonjun Hwang, Sungmin Ahn, Rockhyun Baek
Publikováno v:
Nanomaterials, Vol 13, Iss 5, p 868 (2023)
This study proposed a novel source/drain (S/D) extension scheme to increase the stress in nanosheet (NS) field-effect transistors (NSFETs) and investigated the scheme by using technology-computer-aided-design simulations. In three-dimensional integra
Externí odkaz:
https://doaj.org/article/61d55a28f66f47afb16870e9f1c43fd0
Autor:
Jehyun An, Kyeongkeun Choi, Jongseo Park, Bohyeon Kang, Hyunseo You, Sungmin Ahn, Rockhyun Baek
Publikováno v:
Nanomaterials, Vol 13, Iss 4, p 731 (2023)
In this study, the electrical properties of Al2O3 film were analyzed and optimized to improve the properties of the passivation layer of CMOS image sensors (CISs). During Al2O3 deposition processing, the O2 plasma exposure time was adjusted, and H2 p
Externí odkaz:
https://doaj.org/article/c12a845cacd04989849dfd0fd8433f38