Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Robyn Sue Coleman"'
Publikováno v:
Handbook of Critical Dimension Metrology and Process Control: A Critical Review.
Pareto analysis has become one of the most important and widely used tools in solving quality problems. The usefulness of Pareto analysis extends well beyond the application to defect data being applicable to most every department in a company includ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e22058a583028cf8a1d77233a8c5460a
https://doi.org/10.1117/12.187459
https://doi.org/10.1117/12.187459
Publikováno v:
Advanced Techniques for Integrated Circuit Processing.
Reducing and controlling defect densities is critical to the successful manufacture of semiconductor devices. Automated wafer inspection tools detecting smaller defects and providing more consistent results L2than previous techniques are being used m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ef52fc1682ab7a0c0fc964bceee57708
https://doi.org/10.1117/12.48956
https://doi.org/10.1117/12.48956
Publikováno v:
SPIE Proceedings.
Automated defect inspection tools have been applied in a variety of applications and have proven to contribute key information to successful defect reduction efforts.1 To effectively and efficiently solve defect problems it is necessary to understand
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3b328f4f8c800f0635c53bc6a546485e
https://doi.org/10.1117/12.20065
https://doi.org/10.1117/12.20065